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Variable capacitor and method of manufacturing variable capacitor

  • US 20070039147A1
  • Filed: 10/24/2006
  • Published: 02/22/2007
  • Est. Priority Date: 01/31/2005
  • Status: Abandoned Application
First Claim
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1. A method of manufacturing a variable capacitor whose capacitance is changed by changing a distance between two facing electrodes, comprising the step of stacking an electrode film to be the electrode and a dielectric film having a different stress or thermal expansion coefficient from the electrode film.

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