Monolithic integrated passive and active electronic devices with biocompatible coatings

• US 20070040195A1
• Filed: 08/19/2005
• Published: 02/22/2007
• Est. Priority Date: 08/19/2005
• Status: Abandoned Application

• Current Assignee: U Chicago Argonne, LLC
• Original Assignee: University of Chicago
• Inventors: Auciello, Orlando
• Application Number:
  US11/207,379
• Publication Number:
  US 20070040195A1
• Time in Patent Office: Days
• US Class Current: 257/295
• CPC Class Codes: H01G 4/1227 based on alkaline earth titanates
• CPC Class Codes: H01G 4/33 Thin- or thick-film capacitors thin- or thick-film circuits H01L27/00; capacitors without a potential-jump or surface barrier specially adapted for integrated circuits, details thereof, multistep manufacturing processes therefor H01L28/40
• CPC Class Codes: H01L 28/55 with a dielectric comprising a perovskite structure material
• CPC Class Codes: H01L 28/65 comprising a noble metal or a noble metal oxide, e.g. platinum (Pt), ruthenium (Ru), ruthenium dioxide (RuO2), iridium (Ir), iridium dioxide (IrO2)

Abstract

A bio-compatible electrical element including a high-dielectric amorphous Ti_xAl_1-xO_y oxide alloy wherein a TiO₂ layer is between the bio-compatible electrical element and a biological such as human environment. A continuous and substantially pinhole free dielectric amorphous Ti_xAl_1-xO_y oxide alloy wherein x is in the range of from about 0.5 to about 0.7 and y is in the range of about 2 to about 3 and having a TiO₂ layer exterior thereto formed into a passive element such as a capacitor or an active element such as a microchip is disclosed.

Claims

1. A bio-compatible electrical element including one or more of high-dielectric polycrystalline BaSr_xTi_1-xO₃ (BST), Sr B₂ Ta₂ O₉ or an amorphous Ti_xAl_1-xO_y oxide alloy wherein a TiO₂ layer is between said bio-compatible electrical element and a biological environment.

2. The bio-compatible electrical element of claim 1, wherein said electrical element is an integrated capacitor fabricated on a semiconductor material.

3. The bio-compatible electrical element of claim 1, wherein said electrical element is a gate material in an integrated transistor fabricated on a semiconductor material.

4. The bio-compatible electrical element of claim 1, wherein said high-dielectric amorphous Ti_xAl_1-xO_y oxide alloy has a thickness less than about 100 Angstroms.

5. The bio-compatible electrical element of claim 1, wherein said high-dielectric amorphous Ti_xAl_1-xO_y oxide alloy has a thickness less than about 30 Angstroms.

6. The bio-compatible electrical element of claim 1, wherein said high-dielectric amorphous Ti_xAl_1-xO_y oxide alloy is continuous and substantially free of pinholes.

7. The bio-compatible electrical element of claim 1, wherein said high-dielectric amorphous Ti_xAl_1-xO_y oxide alloy is Ti_xAl_1-xO_y and said TiO₂ layer is on the surface thereof.

8. The bio-compatible electrical element of claim 1, wherein x is in the range of from about 0.5 to about 0.7 and y is in the range of about 2 to about 3.

16. The biocompatible electrical element of claim 1, wherein said electrical element is an integrated capacitor on an insulator.

17. The biocompatible electrical element of claim 16, wherein said insulator is BST or Al₂O₃ or SrBi₂Ta₂O₉.

9. A bio-compatible electrical element including a continuous and substantially pinhole free dielectric amorphous Ti_xAl_1-xO_y oxide alloy wherein x is in the range of from about 0.5 to about 0.7 and y is in the range of about 2 to about 3 and having a TiO₂ layer exterior thereto between said bio-compatible electrical element and a biological environment.

10. The bio-compatible electrical element of claim 9, wherein said high-dielectric amorphous Ti_xAl_1-xO_y oxide alloy has a thickness less than about 100 Angstroms.

11. A bio-compatible electrical capacitor including a high-dielectric amorphous Ti_xAl_1-xO_y layer with a TiO₂ layer between said bio-compatible electrical capacitor and a biological environment.

12. The bio-compatible electrical capacitor of claim 11, wherein the biological environment is a warm blooded animal.

13. The bio-compatible electrical capacitor of claim 12, wherein the biological environment is human.

14. The bio-compatible electrical capacitor of claim 12, wherein the oxide alloy coating is pinhole free.

15. The bio-compatible electrical capacitor of claim 15, wherein the capacitor contains a high dielectric material of BST and/or SrBi₂Ta₂O₉.

18. A biocompatible thin film battery comprising electrodes containing Cu or a CuSn alloy and lithium or a lithium containing material separated by a solid electrolyte encapsulated or separated from a biological environment by TiO₂ or a biologically compatible high dielectrical material such as an amorphous Ti_xAl_1-xO_y oxide alloy or a combination thereof.