Microelectromechanical switches having mechanically active components which are electrically isolated from components of the switch used for the transmission of signals

• US 20070040637A1
• Filed: 08/19/2005
• Published: 02/22/2007
• Est. Priority Date: 08/19/2005
• Status: Abandoned Application

• Current Assignee: Teravicta Technologies Incorporated
• Original Assignee: Teravicta Technologies Incorporated
• Inventors: Flynn, William, Yee, Ian
• Application Number:
  US11/207,324
• Publication Number:
  US 20070040637A1
• Time in Patent Office: Days
• US Class Current: 335/78
• CPC Class Codes: H01H 2059/0072 with stoppers or protrusions for maintaining a gap, reducing the contact area or for preventing stiction between the movable and the fixed electrode in the attracted position
• CPC Class Codes: H01H 59/0009 making use of micromechanics

Abstract

A plate-based microelectromechanical system (MEMS) switch is provided which includes a moveable plate suspended above a substrate and a plurality of arms extending from the periphery of the moveable plate. The moveable plate includes a first electrode suspended over a second electrode arranged on the substrate and a first input/output signal contact structure electrically isolated from the first electrode. In some embodiments, the first input/output signal contact structure is arranged proximate to the edge of the moveable plate. In addition or alternatively, one of the arms is electrically coupled to the first input/output signal contact structure and comprises an input/output signal trace. A cantilever-based MEMS switch is provided which includes a cantilever structure with a first electrode suspended a second electrode arranged upon a substrate. In addition, the cantilever structure includes an input/output signal line spaced apart from the first electrode and arranged above an input/output signal contact structure.

Claims

1. A microelectromechanical system (MEMS) switch, comprising:

a moveable plate suspended above a substrate, wherein the moveable plate comprises;

a first electrode suspended over a second electrode arranged on the substrate; and

a first input/output signal contact structure electrically isolated from the first electrode and suspended above a second input/output signal contact structure arranged on the substrate and spaced apart from the second electrode, wherein the first input/output signal contact structure is arranged proximate to the edge of the moveable plate;

a plurality of arms extending from the periphery of the moveable plate; and

a plurality of support structures coupled between the plurality of arms and the substrate.

2. The MEMS switch of claim 1, wherein the first input/output signal contact is further electrically isolated from the plurality of arms.

3. The MEMS switch of claim 2, wherein the first input/output signal contact is further suspended above a third input/output signal contact arranged on the substrate and spaced adjacent to the second input/output signal contact, and wherein the second and third input/output signal contacts are respectively coupled to input and output signal lines.

4. The MEMS switch of claim 1, wherein the first input/output signal contact is electrically coupled to at least one of the plurality of arms, and wherein the at least one arm comprises an input/output signal line.

5. The MEMS switch of claim 1, wherein the moveable plate comprises:

a main section from which the plurality of arms extend; and

an extension from the main section interposed between two of the plurality of arms.

6. The MEMS switch of claim 5, wherein the first input/output signal contact comprises the extension.

7. The MEMS switch of claim 5, wherein the first electrode comprises the extension.

8. The MEMS switch of claim 1, wherein the moveable plate further comprises an insulating member laterally interposed between the first electrode and the first input/output signal contact.

9. The MEMS switch of claim 1, wherein the first input/output signal contact is laterally spaced from the first electrode by an air gap.

10. A microelectromechanical system (MEMS) switch, comprising:

a moveable plate suspended above a substrate, wherein the moveable plate comprises;

a first electrode suspended over a second electrode arranged on the substrate; and

a first input/output signal contact structure electrically isolated from the first electrode and suspended above a second input/output signal contact structure arranged on the substrate and spaced apart from the second electrode;

a plurality of arms extending from the periphery of the moveable plate, wherein one of the plurality of arms is electrically coupled to the first input/output signal contact structure and comprises an input/output signal trace; and

a plurality of support structures coupled between the plurality of arms and the substrate.

11. The MEMS switch of claim 10, wherein another of the plurality of arms is electrically coupled to the first electrode and is further coupled to one of high and low voltage potentials.

12. The MEMS switch of claim 10, wherein the moveable plate further comprises an insulating member arranged over the first electrode and the first input/output signal contact structure.

13. A microelectromechanical system (MEMS) switch, comprising:

a first electrode arranged upon a substrate;

a first input/output signal contact structure arranged upon the substrate and spaced apart from the first electrode; and

a cantilever structure comprising;

a second electrode suspended above the first electrode; and

an input/output signal line spaced apart from the second electrode and arranged above the first input/output signal contact structure.

14. The MEMS switch of claim 13, wherein the cantilever structure further comprises an insulating member connecting the second electrode and the input/output signal line such that the input/output signal line moves toward the first input/output signal contact structure when the second electrode moves by electrostatic force toward the first electrode.

15. The MEMS switch of claim 14, wherein the insulating member is spaced apart from a fixed end of the cantilever structure.

16. The MEMS switch of claim 14, wherein the insulating member is vertically interposed between the second electrode and the input/output signal line.

17. The MEMS switch of claim 14, wherein the insulating member is laterally interposed between the second electrode and the input/output signal line.

18. The MEMS switch of claim 14, wherein the insulating member is arranged above the second electrode and the input/output signal line.

19. The MEMS switch of claim 14, wherein the insulating member is arranged below the second electrode and the input/output signal line.

20. The MEMS switch of claim 13, wherein the second electrode comprises a cantilevered beam suspended above the fixed electrode and anchored to the substrate, and wherein the input/output signal line comprises a cantilevered signal line beam suspended above the first input/output signal contact structure and anchored to the substrate.

21. The MEMS switch of claim 13, wherein the cantilever structure comprises:

a plurality of supports arranged upon the substrate surface;

segments extending from the plurality of support structures to a common bar suspended above the substrate surface; and

at least one projection extending from the common bar between the segments, wherein the projection comprises the second electrode and the input/output signal line.

22. The MEMS switch of claim 13, wherein the cantilever structure comprises a second input/output signal line spaced apart from the second electrode and arranged above a second input/output signal contact structure arranged upon the substrate.

23. The MEMS switch of claim 13, wherein the cantilever structure comprises a third electrode spaced apart from the first input/output signal line and arranged above a fourth electrode arranged upon the substrate.