Methods and devices for inhibiting tilting of a mirror in an interferometric modulator
First Claim
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1. A device comprising:
- an array of at least two interferometric modulators, each interferometric modulator comprising;
a substrate;
an optical layer positioned over the substrate, the optical layer being at least partially transmissive to incident light;
a mirror positioned over the substrate and movable between a first position spaced from the optical layer by a first distance and a second position spaced from the optical layer by a second distance, the first distance being greater than the second distance, and the mirror having a surface facing away from the substrate, wherein light reflected by the interferometric modulator is interferometrically modulated; and
at least one stationary member contacting the surface of the mirror when the mirror is in the first position, wherein the at least one stationary member is configured to inhibit movement of at least a portion of the mirror when the mirror is in the first position;
wherein the stationary members of the at least two interferometric modulators contact the surface of each respective mirror at a different first distance from the optical layer when the mirrors are in the first position.
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Abstract
Interferometric modulators having a separable modulator architecture are disclosed having a reflective layer suspended from a flexible layer over a cavity. The interferometric modulators have one or more anti-tilt members that inhibit undesirable movement of the reflective layer, such as curling and/or tilting. The stabilization of the reflective layer by the anti-tilt members can improve the quality of the optical output of the interferometric modulators, as well as displays comprising such interferometric modulators.
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Citations
31 Claims
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1. A device comprising:
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an array of at least two interferometric modulators, each interferometric modulator comprising;
a substrate;
an optical layer positioned over the substrate, the optical layer being at least partially transmissive to incident light;
a mirror positioned over the substrate and movable between a first position spaced from the optical layer by a first distance and a second position spaced from the optical layer by a second distance, the first distance being greater than the second distance, and the mirror having a surface facing away from the substrate, wherein light reflected by the interferometric modulator is interferometrically modulated; and
at least one stationary member contacting the surface of the mirror when the mirror is in the first position, wherein the at least one stationary member is configured to inhibit movement of at least a portion of the mirror when the mirror is in the first position;
wherein the stationary members of the at least two interferometric modulators contact the surface of each respective mirror at a different first distance from the optical layer when the mirrors are in the first position. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10, 11, 12, 13, 14, 15)
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16. An array of at least two interferometric modulators, each interferometric modulator comprising:
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means for supporting at least a portion of the interferometric modulator;
means for transmitting light, the transmitting means positioned over the supporting means, the transmitting means at least partially transmissive to incident light;
means for reflecting light, the reflecting means positioned over the supporting means and movable between a first position spaced from the transmitting means by a first distance and a second position spaced from the transmitting means by a second distance, the first distance being greater than the second distance, and the reflecting means having a surface away from the supporting means, wherein light reflected by the interferometric modulator is interferometrically modulated; and
means for stabilizing the reflecting means, the stabilizing means contacting the surface of the reflecting means when the reflecting means is in the first position, wherein the stabilizing means is configured to inhibit movement of at least a portion of the reflecting means when the reflecting means is in the first position;
wherein the stabilizing means of the at least two interferometric modulators contact the surface of each respective reflecting means at a different first distance from the transmitting means when the reflecting means are in the first position. - View Dependent Claims (17, 18, 19, 20, 21)
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22. A method of manufacturing an interferometric modulator comprising:
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forming an optical stack over a substrate;
depositing a sacrificial layer over the optical stack;
depositing a reflective layer over the sacrificial layer;
forming a hole through the sacrificial layer; and
forming a stationary member comprising a first portion formed in the hole and a second portion connected to the first portion, formed over at least a portion of the reflective layer. - View Dependent Claims (23, 24, 25, 26)
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27. An interferometric modulator comprising:
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a substrate;
an optical layer positioned over the substrate, the optical layer being at least partially transmissive to incident light;
a mirror positioned over the substrate and movable between a first position and a second position, wherein a portion of the mirror is spaced from the optical layer by a first distance in the first position, and the portion of the mirror is spaced from the optical layer by a second distance in the second position, the first distance being greater than the second distance, and the mirror having a surface away from the substrate, wherein light reflected by the interferometric modulator is interferometrically modulated; and
at least one stationary member contacting the surface of the mirror facing away from the substrate when the mirror is in the first position, wherein the at least one stationary member is configured to inhibit movement of at least a portion of the mirror when the mirror is in the first position, and further wherein the mirror is positioned and an angle non-parallel to the substrate in the first position. - View Dependent Claims (28, 29, 30, 31)
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Specification