Method and apparatus for shielding correction pixels from spurious charges in an imager
First Claim
Patent Images
1. A pixel array, comprising:
- a plurality of active array pixels on a substrate;
a plurality of dark correction pixels on the substrate; and
an implant region adjacent said plurality of dark correction pixels for absorbing carriers.
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Accused Products
Abstract
A barrier for isolating the dark correction pixels from spurious charges within an image sensor. The barrier comprises a charge absorbing region in a substrate electrically connected to a voltage source terminal. The charge absorbing region completely surrounds the dark correction region of a pixel array. The charge absorbing region absorbs carriers generated by lateral diffusion, near-infrared and infrared light reflected from the bottom of the silicon substrate, and other sources. This absorbing region prevents carriers from being absorbed into the dark correction pixel cells and causing image correction distorting effects.
28 Citations
41 Claims
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1. A pixel array, comprising:
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a plurality of active array pixels on a substrate;
a plurality of dark correction pixels on the substrate; and
an implant region adjacent said plurality of dark correction pixels for absorbing carriers. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10, 11, 12, 13, 14)
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15. An image sensor, comprising:
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an active array region on a substrate for generating an image signal from incident light;
a dark correction region on the substrate for generating a dark correction signal to correct dark currents and row-wise temporal noise;
a perimeter isolation structure surrounding said dark correction region for absorbing carriers from lateral diffusion from said active array region;
an underlying isolation structure between said dark correction region and a bottom of said substrate for absorbing carriers traveling through a lower part of said substrate. - View Dependent Claims (16, 17, 18, 19, 20, 21, 22)
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23. An image processor system comprising:
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a processor;
an image sensor comprising;
an active array of pixel cells on a substrate;
a dark correction region on said substrate; and
an implant region adjacent to said dark correction region for absorbing carriers. - View Dependent Claims (24, 25, 26, 27, 28)
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29. A method of forming a pixel array, the method comprising the acts of:
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providing a substrate;
forming an active array of pixels;
forming a plurality of dark correction pixels on at least one side of said active array of pixels;
forming a horizontal doping implant in said substrate under said plurality of dark correction pixels;
forming vertical doping implants in said substrate around the perimeter of said plurality of dark correction pixels, between said plurality of dark correction pixels and said active array of pixels; and
forming connections coupling a voltage source to said vertical implants. - View Dependent Claims (30, 31, 32, 33, 34, 35)
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36. A pixel array comprising:
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a plurality of active array pixels on a substrate;
a plurality of dark correction pixels on the substrate;
a bottom region in said substrate under said plurality of dark correction pixels for absorbing carriers; and
a surrounding region in said substrate surrounding said plurality of dark correction pixels for absorbing carriers. - View Dependent Claims (37, 38, 39, 40, 41)
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Specification