Method to reduce plasma-induced charging damage
First Claim
1. A method for inhibiting charge damage on a workpiece in a plasma processing chamber during a process transition from one process step to another process step, wherein the process transition comprises changing of at least one process parameter, the method comprising performing a pre-transition compensation of at least one other process parameter so as to inhibit charge damage from occurring during the process transition.
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Accused Products
Abstract
In some implementations, a method is provided for inhibiting charge damage in a plasma processing chamber during a process transition from one process step to another process step, including performing a pre-transition compensation of at least one process parameter so as to inhibit charge damage from occurring during the process transition. In some implementations, a method is provided for inhibiting charge damage during a process transition from one process step to another process step, which includes changing at least one process parameter with a smooth non-linear transition. In some implementations, a method is provided which includes sequentially changing selected process parameters such that a plasma is able to stabilize after each change prior to changing a next selected process parameter.
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Citations
29 Claims
- 1. A method for inhibiting charge damage on a workpiece in a plasma processing chamber during a process transition from one process step to another process step, wherein the process transition comprises changing of at least one process parameter, the method comprising performing a pre-transition compensation of at least one other process parameter so as to inhibit charge damage from occurring during the process transition.
- 14. A method for inhibiting charge damage on a workpiece in a plasma processing chamber during a process transition from one process step to another process step, the method comprising changing at least one process parameter with a smooth non-linear transition so as to inhibit charge damage from occurring during the process transition.
- 19. A method for inhibiting charge damage on a workpiece in a plasma processing chamber during a process transition from one process step to another process step, the method comprising sequentially changing selected process parameters such that a plasma is able to stabilize after each change prior to changing a next selected process parameter.
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24. A method for inhibiting charge damage on a workpiece in a plasma processing chamber during a process transition from one process step to another process step, the method comprising:
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a) monitoring an impedance of a plasma in a steady state;
b) monitoring the impedance of the plasma during a process transition; and
c) limiting a change in the impedance of the plasma during the process transition so as to inhibit charging damage on the workpiece. - View Dependent Claims (25, 26, 27, 28, 29)
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Specification