Alignment precision enhancement of electronic component process on flexible substrate device and method thereof the same
First Claim
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1. An alignment precision enhancement method of an electronic component process on a flexible substrate, comprising steps of:
- placing said flexible substrate on a substrate holder;
completely sticking said flexible substrate by a polymer tape using a press machine, thereby said flexible substrate is adhesively fixed on said substrate holder through said polymer tape;
setting up a plural of alignment mark areas and removing said polymer tape within those alignment mark areas;
depositing or printing an metal or oxide layer on said polymer tape and on said alignment mark areas;
making a plural of alignment marks within those alignment mark areas;
making an electronic component on said polymer tape of the flexible substrate; and
separating said flexible substrate from said substrate holder using an unstressed cutting machine.
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Abstract
Alignment precision enhancement of electronic component process on flexible substrate device and method thereof the same is proposed. The process step of a flexible substrate is put on a substrate holder, wherein the flexible substrate is fixed by a polymer tape. A plural of alignment marks is making for lithography process. An unstressed cut is separated the flexible substrate and substrate holder when the electronic component is made.
15 Citations
18 Claims
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1. An alignment precision enhancement method of an electronic component process on a flexible substrate, comprising steps of:
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placing said flexible substrate on a substrate holder;
completely sticking said flexible substrate by a polymer tape using a press machine, thereby said flexible substrate is adhesively fixed on said substrate holder through said polymer tape;
setting up a plural of alignment mark areas and removing said polymer tape within those alignment mark areas;
depositing or printing an metal or oxide layer on said polymer tape and on said alignment mark areas;
making a plural of alignment marks within those alignment mark areas;
making an electronic component on said polymer tape of the flexible substrate; and
separating said flexible substrate from said substrate holder using an unstressed cutting machine. - View Dependent Claims (2, 3, 4, 5, 6, 7)
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8. An alignment precision enhancement method of an electronic component process on a flexible substrate, comprising steps of:
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making a groove on a substrate holder-and placing said flexible substrate in said indentation;
completely sticking said flexible substrate by a polymer tape using a press machine, thereby said flexible substrate is adhesively fixed on said substrate holder through said polymer tape setting up a plural of alignment mark areas and removing said polymer tape within those alignment mark areas;
depositing or printing an metal or oxide layer on said polymer tape and on said alignment mark areas;
making a plural of alignment marks within those alignment mark areas;
making an electronic component on said polymer tape of the flexible substrate; and
separating said flexible substrate from said substrate holder using an unstressed cutting machine.
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- 9. The method according to claim 9, wherein said substrate holder is made of glass, quartz, metal or ceramic.
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15. An alignment precision enhancement device of an electronic component process on a flexible substrate, comprising:
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a substrate holder for carrying said flexible substrate;
a press machine for completely sticking said flexible substrate on said substrate holder by a polymer tape; and
an unstressed cutting machine for performing an unstressed cut according to positions of a plural of alignment marks and along the width of said flexible substrate so as to separate said flexible substrate from said substrate holder.
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- 17. The device according to claim 17, wherein said flexible substrate is a polymer substrate, an organic and inorganic mixed substrate, a metal substrate or a glass substrate.
Specification