Semiconductor processing temperature control
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Accused Products
Abstract
A temperature control system having a re-circulation loop that uses valves to selectively circulate a temperature control fluid through a cooling system, through a heating system, or through a through passage so as to controlling the temperature of the temperature control fluid, which, in turn, controls the temperature of a target. A temperature sensor monitors the target'"'"'s temperature. A controller controls valve operation in response to the temperature measured by the temperature sensor to obtain a predetermined target temperature. Beneficially, the controller controls the target'"'"'s temperature according to a predetermined temperature profile. Continuous etching along a predetermined temperature profile is possible.
59 Citations
32 Claims
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1-22. -22. (canceled)
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23. A method of forming a contact comprising:
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providing a silicon layer with a copper plug embedded therein;
providing a metal hardmask over the copper plug;
depositing a resist layer over the metal hardmask;
a first etch step for etching a first opening in the resist layer at a first temperature; and
a second etch step for etching the metal hardmask at a second temperature wherein the same etchant is used for the first etch step and the second etch step. - View Dependent Claims (24, 25, 26, 27, 28, 29, 30, 31, 32)
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Specification