Method for fixing functional material apparatus for fixing functional material, device fabrication method, electrooptical device, and electronic equipment
First Claim
1. A droplet ejecting apparatus comprising:
- a tank portion that is capable of storing a liquid material;
a head portion having a nozzle that is capable of ejecting a droplet of the liquid material; and
a light source that is capable of irradiating the droplet with a light.
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Abstract
It is an object of the present invention to provide a method for fixing a functional material with good accuracy in a prescribed position on a fixing surface. In order to attain this object, the present invention provides a method for fixing a functional material, comprising a droplet ejection step of ejecting a droplet of a functional material dispersed in a solvent onto a fixing surface, and a drying step of locally heating the droplet ejected on the fixing surface and gasifying part of the droplet by irradiating the droplet with a laser beam. According to this method, the droplet can be dried rapidly, heating of the entire substrate is suppressed, and loss of alignment or breakage of wiring or the like caused by the expansion of substrate can be avoided.
38 Citations
15 Claims
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1. A droplet ejecting apparatus comprising:
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a tank portion that is capable of storing a liquid material;
a head portion having a nozzle that is capable of ejecting a droplet of the liquid material; and
a light source that is capable of irradiating the droplet with a light. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10, 11, 12, 13, 14)
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15. A droplet ejecting apparatus, comprising:
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a tank that is capable of storing a liquid material;
a substrate carriage capable of carrying a substrate;
a head attached to the tank, the head including a nozzle that is capable of ejecting a droplet of the liquid material toward the substrate carriage;
a light source that is capable of being beamed to the droplet; and
a firing apparatus.
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Specification