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Supporting device for supporting vibration sensitive components

  • US 20070052946A1
  • Filed: 07/14/2006
  • Published: 03/08/2007
  • Est. Priority Date: 07/16/2005
  • Status: Active Grant
First Claim
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1. A supporting device for relative supporting loads with respect to a base comprising:

  • a load side part, a base side part, and an intermediate part giving support to the load side part, and thus defining a supporting direction with reference to the base and the load side, including a pressure chamber bounded by chamber walls, wherein the chamber walls include at least a part, which is provided to be deformable parallel to the support direction that is adapted to be substantially undeformable perpendicular to the support direction, and bendable about two perpendicular axis orthogonal to the support direction, and which is located closer to the base side part than to the load side part.

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