Supporting device for supporting vibration sensitive components
First Claim
Patent Images
1. A supporting device for relative supporting loads with respect to a base comprising:
- a load side part, a base side part, and an intermediate part giving support to the load side part, and thus defining a supporting direction with reference to the base and the load side, including a pressure chamber bounded by chamber walls, wherein the chamber walls include at least a part, which is provided to be deformable parallel to the support direction that is adapted to be substantially undeformable perpendicular to the support direction, and bendable about two perpendicular axis orthogonal to the support direction, and which is located closer to the base side part than to the load side part.
1 Assignment
0 Petitions
Accused Products
Abstract
The invention is in particular a supporting device for relative supporting loads with respect to a base comprising a load side part, a base side part, and an intermediate part giving support to the load side part, and thus defining a supporting direction with reference to the base and the load side, including a pressure chamber bounded by chamber walls.
24 Citations
27 Claims
-
1. A supporting device for relative supporting loads with respect to a base comprising:
-
a load side part, a base side part, and an intermediate part giving support to the load side part, and thus defining a supporting direction with reference to the base and the load side, including a pressure chamber bounded by chamber walls, wherein the chamber walls include at least a part, which is provided to be deformable parallel to the support direction that is adapted to be substantially undeformable perpendicular to the support direction, and bendable about two perpendicular axis orthogonal to the support direction, and which is located closer to the base side part than to the load side part. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10, 11, 12, 13, 14, 15, 16, 17, 18, 19, 20, 21)
-
-
22. A load carrying assembly for carrying vibration sensitive devices comprising:
-
a base frame, a payload for carrying said vibration sensitive devices, and at least three supporting devices;
wherein each supporting device of said at least three supporting devices is for relative supporting loads with respect to a base and comprises;
a load side part, a base side part, and an intermediate part giving support to the load side part, and thus defining a supporting direction with reference to the base and the load side, including a pressure chamber bounded by chamber walls, wherein the chamber walls include at least a part, which is provided to be deformable parallel to the support direction that is adapted to be substantially undeformable perpendicular to the support direction, and bendable about two perpendicular axis orthogonal to the support direction, and which is located closer to the base side part than to the load side part. - View Dependent Claims (23, 24)
-
-
25-26. -26. (canceled)
-
27. An apparatus comprising a load carrying assembly for carrying vibration sensitive devices, said load carrying assembly comprising:
-
a base frame, a payload for carrying said vibration sensitive devices, and at least three supporting devices;
wherein each supporting device of said at least three supporting devices is for relative supporting loads with respect to a base and comprises;
a load side part, a base side part, and an intermediate part giving support to the load side part, and thus defining a supporting direction with reference to the base and the load side, including a pressure chamber bounded by chamber walls, wherein the chamber walls include at least a part, which is provided to be deformable parallel to the support direction that is adapted to be substantially undeformable perpendicular to the support direction, and bendable about two perpendicular axis orthogonal to the support direction, and which is located closer to the base side part than to the load side part; and
wherein said apparatus is one of (i) a metrology tool and (ii) a lithographic tool.
-
Specification