Resonator sensor assembly
First Claim
1. A method of packaging a sensor comprising a flexural resonator, the method comprising:
- affixing a flexural resonator, having an exposed sensing surface, to a platform, wherein a spaced relationship is created between the exposed sensing surface and the platform so that the exposed sensing surface of the flexural resonator can displace a fluid in contact therewith;
affixing an application specific integrated circuit (ASIC) to the platform, providing electrical communication between ASIC and the flexural resonator for providing stimulus to the flexural resonator and for receiving a response signal from the flexural resonator;
affixing a secondary component positioned independently from the ASIC on the platform, the secondary component being selected from a temperature sensor, a field programmable gate array, a calibration unit, a conductive path, a resistor, a capacitor, an amplifier, a filter, and combinations of two or more thereof, and optionally providing electrical communication between the ASIC and the secondary component.
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Accused Products
Abstract
An improved method and assembly, wherein the method generally includes the steps of providing a coated or uncoated sensor element having an exposed sensing surface; attaching the sensor element to a platform so that the exposed sensing surface is spaced from the platform; and optionally applying a protective layer over the platform while maintaining the sensing surface as exposed. The assembly includes a resonator having a free portion with a sensing surface is incorporated onto a platform, components of the sensor are physically shielded from harsh operating conditions, the requisite space is maintained between the free portion of the resonator and the platform, and the sensing surface of the resonator remains exposed for sensing.
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Citations
40 Claims
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1. A method of packaging a sensor comprising a flexural resonator, the method comprising:
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affixing a flexural resonator, having an exposed sensing surface, to a platform, wherein a spaced relationship is created between the exposed sensing surface and the platform so that the exposed sensing surface of the flexural resonator can displace a fluid in contact therewith;
affixing an application specific integrated circuit (ASIC) to the platform, providing electrical communication between ASIC and the flexural resonator for providing stimulus to the flexural resonator and for receiving a response signal from the flexural resonator;
affixing a secondary component positioned independently from the ASIC on the platform, the secondary component being selected from a temperature sensor, a field programmable gate array, a calibration unit, a conductive path, a resistor, a capacitor, an amplifier, a filter, and combinations of two or more thereof, and optionally providing electrical communication between the ASIC and the secondary component. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10, 11, 12, 13, 14, 15, 16, 17, 18, 19, 40)
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20. A package for protecting a sensor comprising a flexural resonator, the package comprising:
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a flexural resonator on a platform, the flexural resonator having one or more exposed sensing surfaces in spaced relationship to the platform so that the exposed sensing surface can displace a fluid in contact therewith to determine one or more characteristics of the fluid, an application specific integrated circuit (ASIC) on the platform, the ASIC being in electrical communication with the flexural resonator for providing stimulus to the flexural resonator and for receiving a response signal from the flexural resonator, and a secondary component positioned independently from the ASIC on the platform, the secondary component being selected from the group a temperature sensor, a field programmable gate array, a calibration unit, a conductive path, a resistor, a capacitor, an amplifier, a filter, and combinations of two or more thereof, the secondary component being in optional electrical communication with the ASIC. - View Dependent Claims (21, 22, 23, 24, 25, 26, 27, 28, 29, 30, 31, 32, 33, 34, 35, 36, 37, 38)
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39. The package 20 wherein the flexural resonator is a tuning fork.
Specification