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Resonator sensor assembly

  • US 20070052970A1
  • Filed: 03/19/2004
  • Published: 03/08/2007
  • Est. Priority Date: 03/21/2003
  • Status: Active Grant
First Claim
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1. A method of packaging a sensor comprising a flexural resonator, the method comprising:

  • affixing a flexural resonator, having an exposed sensing surface, to a platform, wherein a spaced relationship is created between the exposed sensing surface and the platform so that the exposed sensing surface of the flexural resonator can displace a fluid in contact therewith;

    affixing an application specific integrated circuit (ASIC) to the platform, providing electrical communication between ASIC and the flexural resonator for providing stimulus to the flexural resonator and for receiving a response signal from the flexural resonator;

    affixing a secondary component positioned independently from the ASIC on the platform, the secondary component being selected from a temperature sensor, a field programmable gate array, a calibration unit, a conductive path, a resistor, a capacitor, an amplifier, a filter, and combinations of two or more thereof, and optionally providing electrical communication between the ASIC and the secondary component.

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