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Method of fabricating organic electroluminescent devices

  • US 20070054430A1
  • Filed: 09/07/2006
  • Published: 03/08/2007
  • Est. Priority Date: 09/07/2005
  • Status: Active Grant
First Claim
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1. A method of fabricating an organic electroluminescent device comprising the steps of:

  • (1) preparing a substrate on which a first electrode has been formed and forming a laminated film by laminating an organic layer comprising a luminescent layer and a second electrode on the first electrode in this order;

    (2) forming a first sealing film which covers the whole region of the laminated film;

    (3) forming on the surface of the first sealing film a second sealing film having an opening pattern; and

    (4) patterning the first sealing film by dry-etching the first sealing film using the second sealing having the opening pattern as a mask.

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