Additives to prevent degradation of cyclic alkene derivatives

• US 20070057235A1
• Filed: 09/12/2006
• Published: 03/15/2007
• Est. Priority Date: 09/12/2005
• Status: Active Grant

• Current Assignee: Fujifilm Electronic Materials USA Incorporated (Fujifilm Holdings Corporation)
• Original Assignee: Fujifilm Electronic Materials USA Incorporated (Fujifilm Holdings Corporation)
• Inventors: Teff, Daniel, Chagolla, John
• Granted Patent: US 7,931,823 B2
• Time in Patent Office: Days
• US Class Current: 252/397
• CPC Class Codes: C07C 13/00 Cyclic hydrocarbons containing rings other than, or in addition to, six-membered aromatic rings
• CPC Class Codes: C07C 13/64 with a bridged ring system
• CPC Class Codes: C07C 39/04 Phenol
• CPC Class Codes: C07C 39/06 Alkylated phenols
• CPC Class Codes: C07C 7/20 Use of additives, e.g. for stabilisation

Abstract

A stabilized cyclic alkene composition comprising one or more cyclic alkenes, and at least one antioxidant compound having the formula (I),
wherein R¹ through R⁵ can each independently be H, OH, C₁-C₈ linear, branched, or cyclic alkyl, C₁-C₈ linear, branched, or cyclic alkoxy or substituted or unsubstituted aryl, and wherein the antioxidant compound is present in an amount between 1 ppm and 200 ppm and has a boiling point lower than 265° C. A method for forming a layer of carbon-doped silicon oxide on a substrate, which uses the stabilized alkene composition and a silicon containing compound.

Claims

1. A stabilized cyclic alkene composition comprising:

one or more cyclic alkenes, and

at least one antioxidant compound of Formula (I),

wherein R¹ through R⁵ can each independently be H, OH, C₁-C₈ linear, branched, or cyclic alkyl, C₁-C₈ linear, branched, or cyclic alkoxy or substituted or unsubstituted aryl; and

wherein said antioxidant compound is present in an amount between about 1 ppm and 200 ppm; and

wherein said antioxidant compound has a boiling point lower than 265°

C.

2. The composition of claim 1, wherein said antioxidant compound is at least one compound selected from the group consisting of:

phenol, 4-methylphenol, 3-methylphenol, 2-methylphenol, 4-ethylphenol, 4-propylphenol, 4-iso-propylphenol, 4-butylphenol, 4-sec-butylphenol, 4-iso-butylphenol, 4-tert-butylphenol, 4-methoxyphenol, 3-methoxyphenol, 2-methoxyphenol, 4-ethoxyphenol, 2-(1-methylbutyl)phenol, 2-tert-butyl-6-methylphenol, and 1,2-dihydroxybenzene.

3. The composition of claim 2, wherein said antioxidant compound is 4-methoxyphenol.

4. The composition of claim 1, wherein the antioxidant composition is present in an amount between about 1 ppm to about 100 ppm.

5. The composition of claim 1, wherein the antioxidant composition is present in an amount between about 100 ppm to 200 ppm.

6. The composition of claim 1, wherein said cyclic alkene has the general formula C_nH_2n−

2x−

yR_y, wherein n is an integer from 4 to 18, x is an integer wherein 1≦

x≦

n/2, y is an integer wherein 0≦

y≦

2n−

2x, and R is at least one component selected from the group consisting of;

C₁-C₁₈ linear, branched, unsaturated, or cyclic alkyl, C₁-C₁₈ linear, branched, unsaturated, or cyclic alkoxy, substituted or unsubstituted aryl, or a substituted silicon containing substituent.

7. The composition of claim 1, wherein said cyclic alkene has the general formula C_nH_2n−

(2x+2)−

yR_y, wherein n is an integer from 5 to 18, x is an integer wherein x≦

n2, y is an integer wherein 0≦

y≦

2n−

(2x+2), and R is at least one component selected from the group consisting of;

C₁-C₁₈ linear, branched, unsaturated or cyclic alkyl, C₁-C₁₈ linear, branched, unsaturated or cyclic alkoxy, substituted or unsubstituted aryl, or a substituted silicon containing substituent.

8. The composition of claim 1, wherein said cyclic alkene has the general formula C_nH_2n−

(2x+4)−

yR_y, where n is an integer from 7 to 18, x is an integer wherein x≦

n/2, y is an integer wherein 0≦

y≦

2n−

(2x+4), and R is at least one component selected from the group consisting of;

C₁-C₁₈ linear, branched, unsaturated or cyclic alkyl, C₁-C₁₈ linear, branched, unsaturated or cyclic alkoxy, substituted or unsubstituted aryl, or a substituted silicon containing substituent.

9. The composition of claim 1, wherein said cyclic alkene is at least one compound selected from the group consisting of:

dipentene, phellandrene, dicyclopentadiene, alpha-terpinene, gamma-terpinene, limonene, alpha-pinene, 3-carene, terpinolene, norbornene, norbornadiene, 5-vinyl-2-norbornene, and 5-ethylidene-2-norbornene.

10. The composition of claim 1, wherein said cyclic alkene is at least one compound selected from the group consisting of:

dipentene, phellandrene, dicyclopentadiene, alpha-terpinene, gamma-terpinene, limonene, alpha-pinene, 3-carene, terpinolene, norbornene, norbornadiene, 5-vinyl-2-norbornene, and 5-ethylidene-2-norbornene, and wherein said antioxidant compound is 4-methoxyphenol.

11. A method for stabilizing a cyclic alkene, comprising adding at least one antioxidant compound of formula (I),

12. The method of claim 11, wherein said antioxidant compound is at least one compound selected form the group consisting of:

phenol, 4-methylphenol, 3-methylphenol, 2-methylphenol, 4-ethylphenol, 4-propylphenol, 4-iso-propylphenol, 4-butylphenol, 4-sec-butylphenol, 4-iso-butylphenol, 4-tert-butylphenol, 4-methoxyphenol, 3-methoxyphenol, 2-methoxyphenol, 4-ethoxyphenol, 2-(1-methylbutyl)phenol, 2-tert-butyl-6-methylphenol, and 1,2-dihydroxybenzene.

13. The method of claim 12, wherein the antioxidant compound is 4-methoxyphenol.

14. The method of claim 11, wherein said cyclic alkene has the general formula C_nH_2n−

2x−

yR_y, wherein n is an integer from 4 to 18, x is an integer wherein 1≦

x≦

n/2, y is an integer wherein 0≦

y≦

2n−

2x, and R is at least one component selected from the group consisting of;

C₁-C₁₈ linear, branched, unsaturated, or cyclic alkyl, C₁-C₁₈ linear, branched, unsaturated, or cyclic alkoxy, substituted or unsubstituted aryl, or a substituted silicon containing substituent.

15. The method of claim 11, wherein said cyclic alkene has the general formula C_nH_2n−

(2x+2)−

yR_y, wherein n is an integer from 5 to 18, x is an integer wherein x≦

n/2, y is an integer wherein 0≦

y≦

2n−

(2x+2), and R is at least one component selected from the group consisting of;

C₁-C₁₈ linear, branched, unsaturated or cyclic alkyl, C₁-C₁₈ linear, branched, unsaturated or cyclic alkoxy, substituted or unsubstituted aryl, or a substituted silicon containing substituent.

16. The method of claim 11, wherein said cyclic alkene has the general formula C_nH_2n−

(2x+4)−

yR_y, where n is an integer from 7 to 18, x is an integer wherein x≦

n/2, y is an integer wherein 0≦

y≦

2n−

(2x+4), and R is at least one component selected from the group consisting of;

C₁-C₁₈ linear, branched, unsaturated or cyclic alkyl, C₁-C₁₈ linear, branched, unsaturated or cyclic alkoxy, substituted or unsubstituted aryl, or a substituted silicon containing substituent.

17. The method of claim 11, wherein said cyclic alkene is at least one compound selected from the group consisting of:

dipentene, phellandrene, dicyclopentadiene, alpha-terpinene, gamma-terpinene, limonene, alpha-pinene, 3-carene, terpinolene, norbornene, norbornadiene, 5-vinyl-2-norbornene, and 5-ethylidene-2-norbornene.

18. The method of claim 11, wherein said cyclic alkene is at least one compound selected from the group consisting of:

dipentene, phellandrene, dicyclopentadiene, alpha-terpinene, gamma-terpinene, limonene, alpha-pinene, 3-carene, terpinolene, norbornene, norbornadiene, 5-vinyl-2-norbornene, and 5-ethylidene-2-norbornene, and wherein said antioxidant compound is 4-methoxyphenol.

19. A method of forming a layer of carbon-doped silicon oxide on a substrate, the method comprising the steps of:

providing a cyclic alkene composition, a silicon containing compound, and a substrate; and

forming the layer of the carbon-doped silicon oxide on the substrate, wherein said cyclic alkene composition comprises;

one or more cyclic alkenes; and

at least one antioxidant compound of formula (I);

wherein R¹ through R⁵ can each independently be H, OH, C₁-C₈ linear, branched, or cyclic alkyl, C₁-C₈ linear, branched, or cyclic alkoxy or substituted or unsubstituted aryl, and

wherein the antioxidant composition is present in a concentration between 1 ppm to 200 ppm, and

wherein said antioxidant compound has a boiling point lower than 265°

C.

20. The method of claim 19, further comprising the steps of:

providing said cyclic alkene composition in a first container, said silicon containing compound in a second container, a film deposition tool, a film deposition chamber within said film deposition tool, and a stream of carrier gas to sweep said cyclic alkene composition and said silicon containing compound through a connection into the film deposition chamber, wherein said substrate is disposed within said film deposition chamber of said film deposition tool;

connecting said first and second containers to said film deposition chamber within said film deposition tool;

introducing vapors of said cyclic alkene composition and said silicon containing compound into said carrier gas stream; and

transporting said vapors of said cyclic alkene composition and said silicon containing compound into said film deposition chamber.

21. The method of claim 20, wherein said cyclic alkene has the general formula C_nH_2n−

2x−

yR_y, wherein n is an integer from 4 to 18, x is an integer wherein 1≦

x≦

n/2, y is an integer wherein 0≦

y≦

2n−

2x, and R is at least one component selected from the group consisting of;

C₁-C₁₈ linear, branched, unsaturated, or cyclic alkyl, C₁-C₁₈ linear, branched, unsaturated, or cyclic alkoxy, substituted or unsubstituted aryl, or a substituted silicon containing substituent.

22. The method of claim 20, wherein said cyclic alkene has the general formula C_nH_2n−

(2x+2)−

yR_y, wherein n is an integer from 5 to 18, x is an integer wherein x≦

n/2, y is an integer wherein 0≦

y≦

2n−

(2x+2), and R is at least one component selected from the group consisting of;

C₁-C₁₈ linear, branched, unsaturated or cyclic alkyl, C₁-C₁₈ linear, branched, unsaturated or cyclic alkoxy, substituted or unsubstituted aryl, or a substituted silicon containing substituent.

23. The method of claim 20, wherein said cyclic alkene has the general formula C_nH_2n−

(2x+4)−

yR_y, where n is an integer from 7 to 18, x is an integer wherein x≦

n/2, y is an integer wherein 0≦

y≦

2n−

(2x+4), and R is at least one component selected from the group consisting of;

C₁-C₁₈ linear, branched, unsaturated or cyclic alkyl, C₁-C₁₈ linear, branched, unsaturated or cyclic alkoxy, substituted or unsubstituted aryl, or a substituted silicon containing substituent.

24. The method of claim 20, wherein said cyclic alkene is at least one compound selected from the group consisting of:

dipentene, phellandrene, dicyclopentadiene, alpha-terpinene, gamma-terpinene, limonene, alpha-pinene, 3-carene, terpinolene, norbornene, norbornadiene, 5-vinyl-2-n norbornene, and 5-ethylidene-2-norbornene.

25. The method of claim 20, wherein said antioxidant compound is at least one compound selected form the group consisting of:

phenol, 4-methylphenol, 3-methylphenol, 2-methylphenol, 4-ethylphenol, 4-propylphenol, 4-iso-propylphenol, 4-butylphenol, 4-sec-butylphenol, 4-iso-butylphenol, 4-tert-butylphenol, 4-methoxyphenol, 3-methoxyphenol, 2-methoxyphenol, 4-ethoxyphenol, 2-(1-methylbutyl)phenol, 2-tert-butyl-6-methylphenol, 1,2-dihydroxybenzene, 2,4-di-tert-butylphenol, 2,6-di-tert-butyl-4-methylphenol (BHT), 1,3-dihydroxybenzene, hydroquinone, 2-(benzyloxy)phenol, 3,4,5-trimethoxyphenol, 3-ethoxy-4-methylphenol, 4-benzyloxyphenol, 4-benzyl-2,6-di-tert-butylphenol, 2-(2-butenyl)phenol, 4-propoxyphenol, 4-butoxyphenol, 2-(4-methylbenzyl)phenol, 2,4,6-tris-benzyloxyphenol, 2,4-dicyclohexyl-5-methylphenol, and 6-tert-butyl-1,2-dihydroxybenzene.

26. The method of claim 25, wherein said antioxidant compound is 4-methoxyphenol.

27. The method of claim 20, wherein said cyclic alkene is at least one compound selected from the group consisting of:

dipentene, phellandrene, dicyclopentadiene, alpha-terpinene, gamma-terpinene, limonene, alpha-pinene, 3-carene, terpinolene, norbornene, norbornadiene, 5-vinyl-2-norbornene, and 5-ethylidene-2-norbornene, and wherein said antioxidant compound is 4-methoxyphenol.