SUBSTRATE CARRIER HAVING REDUCED HEIGHT

• US 20070057322A1
• Filed: 10/31/2006
• Published: 03/15/2007
• Est. Priority Date: 09/04/2004
• Status: Abandoned Application

• Current Assignee: Applied Materials Incorporated
• Original Assignee: Applied Materials Incorporated
• Inventors: Rice, Michael, Elliott, Martin
• Application Number:
  US11/555,261
• Publication Number:
  US 20070057322A1
• Time in Patent Office: Days
• US Class Current: 257/345
• CPC Class Codes: H01L 21/67353 specially adapted for a single substrate
• CPC Class Codes: H01L 21/67379 characterised by coupling elements, kinematic members, handles or elements to be externally gripped

Abstract

A first substrate carrier is provided that includes a body adapted to store one or more substrates; and either (1) a bottom surface having one or more coupling features that extend into a storage region of the body or (2) coupling features that extend alongside the body, so that the substrate carrier'"'"'s overall height is not increased by the entire height of the coupling feature. Numerous other aspects are provided.

Claims

1. A substrate carrier, comprising:

a body adapted to store one or more substrates, the body having a substrate storage region adapted to store a substrate; and

a bottom surface having one or more coupling features adapted to extend into the substrate storage region outside of a footprint that would be occupied by a substrate positioned in the substrate storage region.

2. The substrate carrier of claim 1, wherein all coupling features occupy the substrate storage region outside of a footprint that would be occupied by a substrate positioned in the substrate storage region.

3. The substrate carrier of claim 1, wherein the one or more coupling features are further adapted to occupy a position along a periphery of a substrate stored in the body.

4. The substrate carrier of claim 1, wherein the one or more coupling features are further adapted to kinematically couple with a corresponding feature on a surface adapted to support the substrate carrier.

5. The substrate carrier of claim 1, wherein the one or more coupling features include at least one of a hole, a slot and a feature to receive a pad.

6. The substrate carrier of claim 5, wherein at least one of the hole and slot is conical.

7. The substrate carrier of claim 5, wherein the pad is flat.

8. An apparatus, comprising:

a plurality of stacked support shelves, each support shelf adapted to support a substrate carrier, wherein the support shelves are spaced a distance from each other that allows transportation between the support shelves of only a substrate carrier, having a body adapted to store one or more substrates, the body having a substrate storage region adapted to store a substrate, and a bottom surface having one or more coupling features adapted to extend into the substrate storage region outside of a footprint that would be occupied by a substrate positioned in the substrate storage region.

9. The apparatus of claim 8 wherein at least one of the support shelves is a docking station adapted to open the substrate carrier and allow substrate extraction therefrom.

10. The apparatus of claim 8 wherein a plurality of the stacked support shelves are docking stations adapted to open the substrate carrier and allow substrate extraction therefrom.

11. The apparatus of claim 8 wherein the support shelves are spaced so as to allow transportation of only small lot size substrate carriers.

12. A substrate carrier, comprising:

a body adapted to store one or more substrates; and

a bottom surface having one or more coupling features located outside a perimeter of the body.

13. The substrate carrier of claim 12, wherein the one or more couplings features are further adapted so as to extend at least partially alongside the body so that at least part of the one or more coupling features does not extend below the body.

14. The substrate carrier of claim 12, wherein the one or more coupling features are further adapted to kinematically couple with a corresponding feature on a surface adapted to support the substrate carrier.

15. The substrate carrier of claim 12, wherein the one or more coupling features includes at least one of a hole and a slot.

16. The substrate carrier of claim 15, wherein at least one of the hole and slot is conical.