MICROFABRICATED ELASTOMERIC VALVE AND PUMP SYSTEMS
2 Assignments
0 Petitions
Accused Products
Abstract
A method of fabricating an elastomeric structure, comprising: forming a first elastomeric layer on top of a first micromachined mold, the first micromachined mold having a first raised protrusion which forms a first recess extending along a bottom surface of the first elastomeric layer; forming a second elastomeric layer on top of a second micromachined mold, the second micromachined mold having a second raised protrusion which forms a second recess extending along a bottom surface of the second elastomeric layer; bonding the bottom surface of the second elastomeric layer onto a top surface of the first elastomeric layer such that a control channel forms in the second recess between the first and second elastomeric layers; and positioning the first elastomeric layer on top of a planar substrate such that a flow channel forms in the first recess between the first elastomeric layer and the planar substrate.
103 Citations
11 Claims
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1-5. -5. (canceled)
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6. A composite structure comprising:
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an elastomer component including at least one of a recess and a flexible membrane portion; and
a substantially planar nonelastomer component sealed against the elastomer component, the nonelastomer component including an active device interacting with at least one of the membrane portion and a material present in the recess. - View Dependent Claims (7, 8, 9, 10)
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11-30. -30. (canceled)
Specification