Microelectromechanical (MEM) fluid health sensing device and fabrication method
First Claim
1. A microelectromechanical (MEM) fluid health sensing device, comprising:
- a MEM viscosity sensor arranged to, when immersed in a fluid, provide an output which varies with the viscosity of said fluid; and
at least one other sensor arranged to, when immersed in said fluid, provide an output which varies with a predetermined parameter of said fluid, said viscosity and said at least one other sensor integrated together on a common substrate.
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Abstract
A microelectromechanical (MEM) fluid health sensing device comprises a viscosity sensor which provides an output that varies with the viscosity of a fluid in which it is immersed, and at least one other sensor which provides an output that varies with another predetermined parameter of the fluid. The viscosity sensor is preferably a MEM device fabricated by means of a “deep etch” process. The sensors are preferably integrated together on a common substrate, though they might also be fabricated separately and packaged together to form a hybrid device. A data processing means may be included which receives the sensor outputs and provides one or more outputs indicative of the health of the fluid. Sensor types which may be part of the present device include, for example, a temperature sensor, a MEM electrochemical sensor, a MEM accelerometer, a MEM contact switch lubricity sensor, and/or an inductive metallic wear sensor.
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Citations
52 Claims
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1. A microelectromechanical (MEM) fluid health sensing device, comprising:
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a MEM viscosity sensor arranged to, when immersed in a fluid, provide an output which varies with the viscosity of said fluid; and
at least one other sensor arranged to, when immersed in said fluid, provide an output which varies with a predetermined parameter of said fluid, said viscosity and said at least one other sensor integrated together on a common substrate. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10, 11, 12, 13, 14, 15, 16, 17, 18, 19)
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20. A microelectromechanical (MEM) fluid health sensing device, comprising:
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a MEM viscosity sensor arranged to sense the viscosity of a fluid in which it is immersed and to provide an output which varies with said viscosity, comprising;
a semiconductor wafer;
a substrate bonded to said wafer and thereby forming a composite structure, portions of said composite structure patterned and etched to form first and second sets of conductive plates spaced apart from each other and having respective parallel surface areas, said first set of plates arranged to interleave with said second set of plates such that their surface areas at least partially overlap to produce a capacitance, one of said sets of plates being a movable element and the other of said sets of plates being a stationary element; and
a drive means for displacing said movable element relative to said stationary element, said viscosity sensor arranged to, when immersed in said fluid, provide an output which varies with the viscosity of said fluid; and
at least one other sensor arranged to, when immersed in said fluid, provide an output which varies with a parameter of said fluid;
said MEM viscosity sensor and said at least one other sensor packaged together in a common housing. - View Dependent Claims (21, 22, 23, 24, 25, 26, 27, 28, 29, 30, 31, 32, 33)
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34. A method of determining the health of a fluid, comprising:
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providing a microelectromechanical (MEM) fluid health sensing device, comprising;
a MEM viscosity sensor arranged to, when immersed in a fluid, provide an output which varies with the viscosity of said fluid; and
at least one other sensor arranged to, when immersed in said fluid, provide an output which varies with a predetermined parameter of said fluid, said viscosity and said at least one other sensor integrated together on a common substrate;
immersing said sensors in a fluid, the health of which is to be determined; and
processing said sensor outputs to provide one or more outputs indicative of the health of said fluid. - View Dependent Claims (35, 36, 37, 38, 39)
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40. A method of fabricating a microelectromechanical (MEM) fluid health sensing device, comprising:
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providing a semiconductor wafer;
providing a substrate;
bonding said wafer and substrate together to form a composite structure; and
patterning and etching portions of said composite structure to form at least two sensors which, when immersed in a fluid the health of which is to be determined, provide respective outputs which vary with one or more parameters of said fluid. - View Dependent Claims (41, 42, 43, 44)
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45. A method of fabricating a microelectromechanical (MEM) fluid health sensing device which includes at least one MEM sensor, each of which has a stationary element and a movable element displaceable relative to the stationary element, comprising:
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providing a silicon-on-insulator (SOI) wafer which includes a silicon handle layer and a silicon device layer;
providing a substrate;
etching a recessed area into said substrate;
bonding said wafer to said substrate to form a composite structure;
removing said silicon handle layer from the SOI wafer to expose said silicon device layer;
patterning and etching portions of said composite structure to define the stationary and movable elements of at least one MEM sensor, and at least one other sensor;
depositing, patterning and etching one or more metallization layers on said composite structure to provide electrical interconnections for said sensors; and
releasing said movable elements;
said sensors arranged to provide respective outputs which vary with one or more parameters of a fluid in which they are immersed. - View Dependent Claims (46, 47, 48, 49, 50, 51, 52)
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Specification