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Microelectromechanical (MEM) fluid health sensing device and fabrication method

  • US 20070062261A1
  • Filed: 09/22/2005
  • Published: 03/22/2007
  • Est. Priority Date: 09/22/2005
  • Status: Active Grant
First Claim
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1. A microelectromechanical (MEM) fluid health sensing device, comprising:

  • a MEM viscosity sensor arranged to, when immersed in a fluid, provide an output which varies with the viscosity of said fluid; and

    at least one other sensor arranged to, when immersed in said fluid, provide an output which varies with a predetermined parameter of said fluid, said viscosity and said at least one other sensor integrated together on a common substrate.

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