Adjusted frequency temperature coefficient resonator
First Claim
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1. A temperature compensated pair of resonators, comprising:
- a first resonator configured to resonate at a first frequency and having a first frequency temperature coefficient; and
a second resonator configured to resonate at a second frequency and having a second frequency temperature coefficient, wherein the second frequency is greater than the first frequency, wherein the second frequency temperature coefficient is less than the first frequency temperature coefficient, and wherein the first and the second resonators are fabricated on a common substrate.
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Abstract
A temperature compensated pair of resonators. The temperature compensated pair of resonators comprises a first resonator configured to resonate at a first frequency and having a first frequency temperature coefficient and a second resonator configured to resonate at a second frequency and having a second frequency temperature coefficient. The second frequency is greater than the first frequency; the second frequency temperature coefficient is less than the first frequency temperature coefficient; and the first and the second resonators are fabricated on a common substrate.
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Citations
50 Claims
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1. A temperature compensated pair of resonators, comprising:
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a first resonator configured to resonate at a first frequency and having a first frequency temperature coefficient; and
a second resonator configured to resonate at a second frequency and having a second frequency temperature coefficient, wherein the second frequency is greater than the first frequency, wherein the second frequency temperature coefficient is less than the first frequency temperature coefficient, and wherein the first and the second resonators are fabricated on a common substrate. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10, 11, 12, 13, 14, 15, 16, 17, 18, 19, 20, 21)
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22. A method for fabricating a first resonator and a second resonator on a substrate, comprising:
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creating a first bottom electrode and a second bottom electrode, wherein the first bottom electrode and the second bottom electrode partially overlay the substrate;
creating a first bottom piezoelectric layer and a second bottom piezoelectric layer, wherein the first bottom piezoelectric layer at least partially overlays the first bottom electrode and wherein the second bottom piezoelectric layer at least partially overlays the second bottom electrode;
creating an interstitial layer, wherein the interstitial layer at least partially overlays the first bottom piezoelectric layer;
creating a first top piezoelectric layer and a second top piezoelectric layer, wherein the first top piezoelectric layer at least partially overlays the interstitial layer and wherein the second top piezoelectric layer at least partially overlays the second bottom piezoelectric layer; and
creating a first top electrode and a second top electrode, wherein the first top electrode is located over at least part of the first top piezoelectric layer and wherein the second top electrode at least partially overlays the second top piezoelectric layer. - View Dependent Claims (23, 24, 25, 26, 27, 28)
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29. A method for fabricating a first resonator and a second resonator on a substrate, comprising:
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creating a first bottom electrode partially overlaying the substrate and a second bottom electrode partially overlaying the substrate;
creating a first piezoelectric layer and a second piezoelectric layer, wherein the first piezoelectric layer at least partially overlays the first bottom electrode and wherein the second piezoelectric layer at least partially overlays the second bottom electrode;
creating a first top electrode and a second top electrode, wherein the second top electrode at least partially overlays the second piezoelectric layer; and
creating a mass load layer, wherein the temperature coefficient of the stiffness of the mass load layer differs from that of the second top electrode and wherein either the first top electrode at least partially overlays the first piezoelectric layer and the mass load layer at least partially overlays the first top electrode or the mass load layer at least partially overlays the first piezoelectric layer and the first top electrode at least partially overlays the mass load layer. - View Dependent Claims (30, 31, 32, 33, 34, 35, 36, 37, 38)
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39. A method for fabricating a first resonator and a second resonator on a substrate, comprising:
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creating a bottom mass load layer;
creating a first bottom electrode and a second bottom electrode, wherein the second bottom electrode partially overlays the substrate and wherein the temperature coefficient of the stiffness of the bottom mass load layer differs from that of the second bottom electrode;
creating a first piezoelectric layer and a second piezoelectric layer, wherein the second piezoelectric layer at least partially overlays the second bottom electrode and wherein either the bottom mass load layer partially overlays the substrate, the first bottom electrode at least partially overlays the bottom mass load layer, and the first piezoelectric layer at least partially overlays the first bottom electrode or the first bottom electrode partially overlays the substrate, the bottom mass load layer at least partially overlays the first bottom electrode, and the first piezoelectric layer at least partially overlays the bottom mass load layer; and
creating a first top electrode and a second top electrode, wherein the first top electrode is located over the first piezoelectric layer and wherein the second top electrode at least partially overlays the second piezoelectric layer. - View Dependent Claims (40, 41, 42, 43, 44, 45, 46, 47, 48, 49, 50)
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Specification