POLYMER BULK ACOUSTIC RESONATOR
First Claim
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1. A polymer bulk acoustic resonator comprising:
- an active semiconductor layer;
a first thin film electrode layer applied to said semiconductor layer;
a thin film electro-active polymer layer applied to said first thin film electrode layer; and
a second thin film electrode layer applied to said thin film electro-active polymer layer.
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Abstract
A polymer bulk acoustic resonator that includes an active semiconductor layer, a first thin film electrode layer applied to the semiconductor layer, a thin film electro-active polymer layer applied to the first thin film electrode layer; and a second thin film electrode layer applied to the thin film electro-active polymer layer.
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Citations
27 Claims
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1. A polymer bulk acoustic resonator comprising:
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an active semiconductor layer;
a first thin film electrode layer applied to said semiconductor layer;
a thin film electro-active polymer layer applied to said first thin film electrode layer; and
a second thin film electrode layer applied to said thin film electro-active polymer layer. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10, 11, 12, 13)
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14. A method of making a polymer bulk acoustic resonator comprising;
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applying a first thin film electrode layer to a semiconductor layer;
applying a thin film electro-active polymer layer to the first thin film electrode layer, by evaporating a stoichiometrically balanced monomer sample on said first thin film electrode layer;
annealing said evaporated sample which has been applied to said first thin film electrode layer; and
applying a second thin film electrode layer applied to the thin film electro-active polymer layer. - View Dependent Claims (15, 16)
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17. A method of making a polymer bulk acoustic resonator comprising;
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applying a first thin film electrode layer to a semiconductor layer;
applying a thin film electro-active oligomer layer to the first thin film electrode layer; and
applying a second thin film electrode layer applied to the thin film electro-active polymer layer. - View Dependent Claims (18, 19, 20, 21)
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22. A method of making a polymer bulk acoustic resonator comprising;
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applying a first thin film electrode layer to a semiconductor layer;
applying a polymer electret thin film layer to the first thin film electrode layer; and
applying a second thin film electrode layer applied to the thin film electro-active polymer layer. - View Dependent Claims (23, 24, 25)
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26. The method of making a polymer bulk acoustic resonator comprising;
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applying a first thin film electrode layer to a semiconductor layer;
applying a thin film electro-active polymer layer to the first thin film electrode layer; and
applying a second thin film electrode layer applied to the thin film electro-active polymer layer. - View Dependent Claims (27)
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Specification