Angle interferometers
First Claim
Patent Images
1. A method, comprising:
- directing a beam to reflect from an interface at a non-normal angle, the beam having an s-polarized component and a p-polarized component at the interface, wherein the non-normal reflection introduces a phase change upon reflection for each component that differs from one another according to the incident angle of the beam; and
measuring an optical interference signal related to the phase change between the components of the reflected beam to determine information about the incident angle of the beam.
1 Assignment
0 Petitions
Accused Products
Abstract
Methods and systems for determining information about the incident angle of a beam are disclosed, the method including directing a beam having an s-polarized component and a p-polarized component to reflect from an interface at a non-normal angle, where the non-normal reflection introduces for each component a phase change upon reflection that is different for each component, and measuring an optical interference signal related to the phase change between the components of the reflected beam.
48 Citations
48 Claims
-
1. A method, comprising:
-
directing a beam to reflect from an interface at a non-normal angle, the beam having an s-polarized component and a p-polarized component at the interface, wherein the non-normal reflection introduces a phase change upon reflection for each component that differs from one another according to the incident angle of the beam; and
measuring an optical interference signal related to the phase change between the components of the reflected beam to determine information about the incident angle of the beam. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10, 11, 12, 13, 14, 15, 16, 17, 18, 19, 20, 21, 22)
-
-
23. A system, comprising:
-
an optical element having an interface positioned relative to a beam path so that a beam propagating along the path reflects from the interface at a non-normal angle, the beam having an s-polarized component and a p-polarized component at the interface, wherein the non-normal reflection introduces a phase change upon reflection for the s-polarized and p-polarized components that differ from one another according to the incident angle of the beam;
a detector positioned to receive the beam after it reflects from the interface; and
an electronic processor coupled to the detector and configured to measure an optical interference signal related to the phase change between the components of the reflected beam to determine information about the incident angle of the beam. - View Dependent Claims (24, 25, 26, 27, 28, 29, 30, 31, 32, 33, 34, 35, 36, 37, 38, 39, 40, 41, 42, 43, 44, 45, 46, 47, 48)
-
Specification