Light modulator with tunable optical state
First Claim
1. An electronic light modulator device for at least partially displaying a pixel of an image, the device comprising first and second reflectors defining an optical cavity therebetween, the optical cavity being selective of an electromagnetic wavelength at an intensity by optical interference, the device having at least first and second optical states, the first optical state being tunable, and the second optical state not being tunable.
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Accused Products
Abstract
An electronic light modulator device for at least partially displaying a pixel of an image, the device comprising first and second reflectors defining an optical cavity therebetween, the optical cavity being selective of an electromagnetic wavelength at an intensity by optical interference, the device having at least first and second optical states, at least one of the optical states being tunable and the other not tunable.
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Citations
32 Claims
- 1. An electronic light modulator device for at least partially displaying a pixel of an image, the device comprising first and second reflectors defining an optical cavity therebetween, the optical cavity being selective of an electromagnetic wavelength at an intensity by optical interference, the device having at least first and second optical states, the first optical state being tunable, and the second optical state not being tunable.
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5. An electronic device for displaying a pixel of an image, comprising in combination:
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means for interference of electromagnetic radiation including at least two substantially parallel means for reflecting the electromagnetic radiation, and means for controlling at least one of the at least two means for reflecting to form at least two distinct optical states, at least one of the two distinct optical states being tunable. - View Dependent Claims (6)
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7. A Fabry-Perot interferometer, comprising:
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a) substantially parallel first and second reflector plates having first and second reflecting surfaces respectively, at least one of the first and second reflecting plates being movable, the first and second reflecting surfaces being spaced apart by a variable optical gap between the first and second reflecting surfaces, and b) at least one fixed electrostatic control plate adapted to control the variable optical gap by application of a control voltage, the control plate being spaced apart from the first reflector plate by a first distance and being spaced apart from the second reflector plate by a second distance smaller than the first distance. - View Dependent Claims (8, 9, 10, 11, 12, 13, 14, 15, 16, 17, 18, 19, 20, 21, 22, 23, 24, 25, 26, 27, 28)
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29. An electronic light modulator device for at least partially displaying a pixel of an image, the device comprising first and second reflectors defining an optical cavity therebetween, the optical cavity being selective of an electromagnetic wavelength at an intensity by optical interference, the device having at least first and second optical states characterized by first and second optical gaps respectively, neither of the first and second optical states being tunable by applying an electric potential, and the device having a range of intermediate optical gaps between the first and second optical gaps, any of the intermediate optical gaps being selectable by varying an electric field applied to at least one of the first and second reflectors.
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30. An electronic light modulator device for at least partially displaying a pixel of an image, the device comprising:
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a) first and second reflectors defining an optical cavity therebetween, the optical cavity being selective of an electromagnetic wavelength at an intensity by optical interference, and b) first, second, and third electrodes, the first electrode being coupled to the first reflector, the second electrode being coupled to the second reflector, and the third electrode being coupled to a control plate, whereby a number of optical states are selectable by selectively applying an electric potential between at least two of the first, second, and third electrodes, wherein the number of selectable optical states include at least a first optical state that is tunable and a second optical state that is not tunable.
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31. A method for making a light modulator, comprising:
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a) providing a substrate having at least an insulating surface, b) depositing and patterning a conductive electrode on the insulating surface, c) depositing a first layer of sacrificial material, d) forming a first reflecting plate having a reflective surface, e) depositing a second layer of sacrificial material, f) forming a second reflecting plate having an at least partially reflective surface, and g) removing the first and second layers of sacrificial material to release at least the second reflecting plate. - View Dependent Claims (32)
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Specification