Microphone with irregular diaphragm
First Claim
Patent Images
1. A microphone comprising:
- a backplate having a hole therethrough; and
a diaphragm movably coupled with the backplate, the diaphragm having a bottom surface facing the backplate, the bottom surface of the diaphragm having a protruding portion substantially aligned with the hole in the backplate.
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Accused Products
Abstract
A microphone is formed to have a diaphragm that is configured to improve signal to noise ratio. To that end, the microphone has a backplate having a hole therethrough, and a diaphragm movably coupled with the backplate. The diaphragm has a bottom surface (facing the backplate) with a convex portion aligned with the hole in the backplate.
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Citations
20 Claims
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1. A microphone comprising:
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a backplate having a hole therethrough; and
a diaphragm movably coupled with the backplate, the diaphragm having a bottom surface facing the backplate, the bottom surface of the diaphragm having a protruding portion substantially aligned with the hole in the backplate. - View Dependent Claims (2, 3, 4, 5, 6, 7)
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8. A MEMS microphone comprising:
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a backplate having at least one hole formed therethrough; and
a diaphragm secured to the backplate, the diaphragm having a protrusion extending toward the backplate, the protrusion substantially sharing a vertical plane with the at least one hole. - View Dependent Claims (9, 10, 11, 12, 13, 14)
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15. A method of forming a MEMS device, the method comprising:
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providing a backplate having a hole;
forming a diaphragm having a protruding portion on a bottom surface, the diaphragm being formed to be coupled with the backplate; and
forming a space between the diaphragm and the backplate, the diaphragm bottom surface facing the backplate, the protruding portion being substantially aligned with the hole in the backplate. - View Dependent Claims (16, 17, 18, 19, 20)
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Specification