Method and apparatus for manufacturing a pixel matrix of a color filter for a flat panel display

• US 20070065571A1
• Filed: 09/13/2006
• Published: 03/22/2007
• Est. Priority Date: 09/19/2005
• Status: Abandoned Application

• Current Assignee: Applied Materials Incorporated
• Original Assignee: Applied Materials Incorporated
• Inventors: Ye, Yan, White, John, Shang, Quanyuan, Zhou, Ligui
• Application Number:
  US11/521,577
• Publication Number:
  US 20070065571A1
• Time in Patent Office: Days
• US Class Current: 427/68
• CPC Class Codes: B23K 26/066 by using masks
• CPC Class Codes: B23K 26/389 of fluid openings, e.g. nozzles, jets laser machining of inkjet nozzles B41J2/1634
• CPC Class Codes: G02B 5/201 in the form of arrays
• CPC Class Codes: G02F 1/1303 Apparatus specially adapted to the manufacture of LCDs
• CPC Class Codes: G02F 1/133377 Cells with plural compartments or having plurality of liquid crystal microcells partitioned by walls, e.g. one microcell per pixel
• CPC Class Codes: H10K 59/38 comprising colour filters or colour changing media [CCM]

Abstract

Apparatus and methods are provided for forming a pixel matrix. The methods include coating a substrate with a pixel matrix material, coating the pixel matrix material with an ink-phobic material, and forming pixel wells in the pixel matrix material and the ink-phobic material. A system for forming a pixel matrix is provided that includes a patterning tool including a laser ablation system operable to form pixel wells in pixel matrix material coated with ink-phobic material. The laser ablation system is operable to form pixel wells in pixel matrix material coated with ink-phobic material in an oxygenated environment so that the sidewalls of the pixel matrix are made to be ink-philic. The invention also includes a pixel well structure in which the top surfaces of the pixel well is ink-phobic and the surfaces of the sidewalls are ink-philic. Numerous other aspects are provided.

Claims

1. A method of forming a pixel matrix comprising:

coating a substrate with a pixel matrix material;

coating the pixel matrix material with an ink-phobic material; and

forming pixel wells in the pixel matrix material and the ink-phobic material.

2. The method of claim 1 wherein the substrate is glass suitable for use in manufacturing a color filter for a flat panel display.

3. The method of claim 1 wherein the substrate is coated with a pixel matrix material that is ink-philic.

4. The method of claim 1 wherein the substrate is coated with a pixel matrix material having a thickness suitable for forming pixel wells.

5. The method of claim 1 wherein the pixel matrix material is coated with a layer of ink-phobic material that is thin relative to a thickness of the pixel matrix material.

6. The method of claim 1 wherein forming pixel wells includes forming the pixel wells such that a top surface of the pixel wells is ink-phobic and side surfaces of the pixel wells are ink-philic.

7. The method of claim 1 wherein forming pixel wells includes patterning a pixel matrix using laser ablation.

8. The method of claim 7 wherein patterning a pixel matrix using laser ablation includes using laser ablation in an oxygenated environment.

9. The method of claim 8 wherein laser ablating in an oxygenated environment causes formation of pixel well sidewalls that are ink-philic.

10. The method of claim 9 wherein a top surface of the pixel wells is ink-phobic due to the ink-phobic coating.

11. The method of claim 7 wherein a laser source disposed below the substrate is used to ablate, through the substrate, the coating of the pixel matrix material disposed on a top surface of the substrate.

12. A method of forming a pixel matrix comprising:

coating a substrate with an ink-phobic pixel matrix material; and

forming pixel wells in the pixel matrix material using laser ablation in an oxygenated environment to directly pattern the pixel wells,

wherein the pixel wells are formed such that a top surface of the pixel wells is ink-phobic and sidewall surfaces of the pixel wells are ink-phillic.

13. A system for forming a pixel matrix comprising:

a patterning tool including a laser ablation system operable to form pixel wells in pixel matrix material on a substrate,

wherein the laser ablation system is operable to form the pixel wells with an ink-phobic top surface and ink-phillic sidewall surfaces.

14. The system of claim 13 wherein the laser ablation system is operable to form pixel wells in pixel matrix material coated with ink-phobic material.

15. The system of claim 13 wherein the laser ablation system is operable to form pixel wells in pixel matrix material in an oxygenated environment.

16. The system of claim 13 wherein the patterning tool includes a vacuum system adapted to remove materials volatilized by the laser ablation system.

17. The system of claim 13 wherein the patterning tool includes a mask through which the laser ablation system volatizes the pixel matrix material to form a matrix of pixel wells.

18. The system of claim 13 wherein the laser ablation system is operable to form pixel wells in pixel matrix material coated with ink-phobic material using at least one laser disposed below the substrate,

wherein the laser ablation system includes an enclosure and an oxygen supply and is operable to form pixel wells in pixel matrix material in an oxygenated environment,

wherein the patterning tool includes a vacuum system disposed above the substrate and adapted to remove materials as the materials are volatilized by the laser ablation system, and

wherein the patterning tool includes a mask disposed between the laser and the substrate, and through which the laser ablation system volatizes the pixel matrix material to form a matrix of pixel wells.

19. A method of forming a pixel matrix comprising:

printing a pixel matrix by depositing a plurality of beads of pixel matrix material on a substrate in a matrix pattern; and

laser ablating a portion of each bead of pixel matrix material to form vertical sidewall surfaces.

20. The method of claim 19 wherein the substrate is glass suitable for use in manufacturing a color filter for a flat panel display.

21. The method of claim 19 wherein the pixel matrix material is ink-phobic.

22. The method of claim 19 wherein the deposited beads of pixel matrix material has a height suitable for forming pixel wells.

23. The method of claim 19 wherein laser ablating a portion of each bead of pixel matrix material includes laser ablating a portion of each bead of pixel matrix material in an oxygenated environment to form ink-philic sidewall surfaces.

24. A pixel matrix comprising:

a plurality of pixel wells, each pixel well including a top surface and a sidewall surface,

wherein the top surface is ink-phobic, and

wherein the sidewall surface is ink-philic.

25. The pixel matrix of claim 24 wherein the pixel wells are formed on a substrate and the pixel matrix is adapted to receive ink to form a color filter.

26. The pixel matrix of claim 24 wherein the pixel wells are formed on a substrate by laser ablating a pixel well pattern in a top layer of black matrix material on the substrate using a laser source disposed below the substrate and directed through the substrate.

27. The pixel matrix of claim 26 wherein the pixel wells are formed on a substrate using a patterning mask disposed between the laser source and the substrate.

28. The pixel matrix of claim 24 wherein the pixel wells are formed on a substrate by lithography.