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Micro-structure formed of thin films

  • US 20070065595A1
  • Filed: 11/20/2006
  • Published: 03/22/2007
  • Est. Priority Date: 05/01/1997
  • Status: Abandoned Application
First Claim
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1. A method of forming a micro-structure with a plurality of laminated thin films, comprising:

  • cleaning one surface of one laminated thin film of the plurality of laminated thin films and another surface of another laminated thin film of the plurality of laminated thin films that is opposite the one surface in order to remove impurities on the one surface and the another surface;

    contacting directly and bonding together the one surface and the another surface after cleaning the one surface and the another surface; and

    repeating the cleaning of surfaces and the direct contacting and bonding together of surfaces until all of the plurality of laminated thin films are bonded together.

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