Micro-structure formed of thin films
First Claim
1. A method of forming a micro-structure with a plurality of laminated thin films, comprising:
- cleaning one surface of one laminated thin film of the plurality of laminated thin films and another surface of another laminated thin film of the plurality of laminated thin films that is opposite the one surface in order to remove impurities on the one surface and the another surface;
contacting directly and bonding together the one surface and the another surface after cleaning the one surface and the another surface; and
repeating the cleaning of surfaces and the direct contacting and bonding together of surfaces until all of the plurality of laminated thin films are bonded together.
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Accused Products
Abstract
A substrate on which a plurality of thin films having a plurality of cross-sections corresponding to the cross-section of a micro-structure are formed is placed on a substrate holder. The substrate holder is elevated to bond a thin film formed on the substrate to the surface of a stage, and by lowering the substrate holder, the thin film is separated from the substrate and transferred to the stage side. The transfer process is repeated to laminate a plurality of thin films on the stage and to form the micro-structure. Accordingly, there are provided a micro-structure having high dimensional precision, especially high resolution in the lamination direction, which can be manufactured from a metal or an insulator such as ceramics and can be manufactured in the combined form of structural elements together, and a manufacturing method and an apparatus thereof.
26 Citations
21 Claims
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1. A method of forming a micro-structure with a plurality of laminated thin films, comprising:
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cleaning one surface of one laminated thin film of the plurality of laminated thin films and another surface of another laminated thin film of the plurality of laminated thin films that is opposite the one surface in order to remove impurities on the one surface and the another surface;
contacting directly and bonding together the one surface and the another surface after cleaning the one surface and the another surface; and
repeating the cleaning of surfaces and the direct contacting and bonding together of surfaces until all of the plurality of laminated thin films are bonded together. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10, 11, 12, 13, 14, 15, 16, 17, 18, 19, 20, 21)
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Specification