Transparent thin film transistor (TFT) and its method of manufacture

• US 20070069209A1
• Filed: 09/27/2006
• Published: 03/29/2007
• Est. Priority Date: 09/27/2005
• Status: Abandoned Application

• Current Assignee: Samsung Display Company Limited (Samsung Electronics Co. Ltd.)
• Original Assignee: Samsung Display Company Limited (Samsung Electronics Co. Ltd.)
• Inventors: Mo, Yeon-Gon, Jeong, Jae-Kyeong, Shin, Hyun-Soo
• Application Number:
  US11/527,330
• Publication Number:
  US 20070069209A1
• Time in Patent Office: Days
• US Class Current: 257/57
• CPC Class Codes: H01L 29/78621 with LDD structure or an extension or an offset region or characterised by the doping profile
• CPC Class Codes: H01L 29/78681 having a semiconductor body comprising AIIIBV or AIIBVI or AIVBVI semiconductor materials, or Se or Te
• CPC Class Codes: H01L 29/7869 having a semiconductor body comprising an oxide semiconductor material, e.g. zinc oxide, copper aluminium oxide, cadmium stannate

Abstract

A transparent thin film transistor (TFT) and a method of fabricating the same are provided. The transparent TFT includes transparent source and drain electrodes formed of transparent material, a transparent semiconductor activation layer that contacts the source and drain electrodes, that is formed of transparent semiconductor, and in which source and drain regions are formed, and a doping section provided between the transparent source and drain electrodes and the transparent activation layer to have the same doping type as that of the source and drain regions and to have doping concentration different from that of the source and drain regions. At this time, doping during the formation of the doping section is performed by an in-situ method in which a gas containing impurities is sprayed in the same apparatus as the apparatus used for the previous step. Therefore, it is possible to reduce high contact resistance generated when the transparent semiconductor activation layer contacts the transparent electrodes and to thus form ohmic contact.

Claims

1. A transparent Thin Film Transistor (TFT) comprising:

transparent source and drain electrodes;

a transparent semiconductor activation layer arranged to contact the source and drain electrodes and having source and drain regions arranged therein; and

a doping section arranged between the transparent source and drain electrodes and the transparent activation layer and having the same doping type as that of the source and drain regions and having a doping concentration different from that of the source and drain regions.

2. The transparent TFT as claimed in claim 1, wherein the doping section comprises doping layers interposed between the source and drain electrodes and the transparent semiconductor.

3. The transparent TFT as claimed in claim 1, wherein the doping section comprises regions of the transparent semiconductor activation layer including a surface contacting the source and drain electrode.

4. The transparent TFT as claimed in claim 1, wherein the source and drain regions are p-type, and wherein the doping section has a p-type doping concentration higher than a doping concentration of a channel region.

5. The transparent TFT as claimed in claim 4, wherein the transparent semiconductor activation layer is of a material selected from the group consisting of ZnO, ZnSnO, and InGaZnO, and wherein the doping section is doped with a material selected from the group consisting of N, P, and As.

6. The transparent TFT as claimed in claim 4, wherein the transparent semiconductor activation layer is SiC, and wherein the doping section is doped with either Al or B.

7. The transparent TFT as claimed in claim 4, wherein the transparent semiconductor activation layer is of a material selected from the group consisting of GaN, InGaN, AlGaN, and InAlGaN, and wherein the doping section is doped with Mg.

8. The transparent TFT as claimed in claim 1, wherein the source and drain regions are n-type, and wherein the doping section has an n-type doping concentration lower than a doping concentration of a channel region.

9. The transparent TFT as claimed in claim 8, wherein the transparent semiconductor activation layer is SiC, and wherein the doping section is doped with either N or P.

10. The transparent TFT as claimed in claim 8, wherein the transparent semiconductor activation layer is of a material selected from the group consisting of InGaN, AlGaN, and InAlGaN, and wherein the doping section is doped with a material selected from the group consisting of Si, O, C, and Be.

11. A method of manufacturing a transparent Thin Film Transistor (TFT), the method comprising:

forming transparent source and drain electrodes of a transparent material;

forming source and drain regions within a transparent semiconductor activation layer of a transparent semiconductor, the transparent semiconductor activation layer contacting the source and drain electrodes;

forming a doping section doped with impurities, the doping section having the same doping type as that of the source and drain regions and having a doping concentration different from that of the source and drain regions.

12. The method as claimed in claim 11, wherein the doping section is doped by an in-situ method in which a gas containing impurities is sprayed in an apparatus used for forming the transparent semiconductor activation layer.

14. The transparent TFT as claimed in claim 11, wherein the first transparent semiconductor material is selected from the group consisting of ZnO, ZnSnO, CdSnO, GaSnO, TlSnO, InGaZnO, CuAlO, SrCuO, LaCuOS, GaN, InGaN, AlGaN, InGaAlN, SiC, and diamonds.

15. The transparent TFT as claimed in claim 14, wherein the second transparent semiconductor material is the same as the first transparent semiconductor material.

16. The transparent TFT as claimed in claim 12, wherein the source and drain electrodes are of a material selected from the group consisting of ITO, IZO, and ITZO.

17. The transparent TFT as claimed in claim 16, wherein the gate electrode, the gate insulating layer, and the doping layers are of a transparent material.

18. The transparent TFT as claimed in claim 17, wherein the thickness of the doping layers is in a range of from 10 to 100 nm.

19. The transparent TFT as claimed in claim 18, wherein the source and drain regions are p-type, and wherein the doping layers have a p-type doping concentration higher than the doping concentration of the source and drain regions.

20. The transparent TFT as claimed in claim 19, wherein the transparent semiconductor material is selected from the group consisting of ZnO, ZnSnO, and InGaZnO, and wherein the doping section is doped with a material selected from the group consisting of N, P, and As.

21. The transparent TFT as claimed in claim 19, wherein the transparent semiconductor material is SiC, and wherein the doping section is doped with either Al or B.

22. The transparent TFT as claimed in claim 19, wherein the transparent semiconductor material is selected from the group consisting of GaN, InGaN, AlGaN, and InAlGaN, and wherein the doping section is doped with Mg.

23. The transparent TFT as claimed in claim 18, wherein the source and drain regions are n-type, and wherein the doping section has an n-type doping concentration lower than the doping concentration of the channel region.

24. The transparent TFT as claimed in claim 23, wherein the transparent semiconductor material is SiC, and wherein the doping section is doped with either N or P.

25. The transparent TFT as claimed in claim 23, wherein the transparent semiconductor material is selected from the group consisting of InGaN, AlGaN, and InAlGaN, and wherein the doping section is doped with a material selected from the group consisting of Si, O, C, and Be.

13. A transparent Thin Film Transistor (TFT) comprising:

a gate electrode arranged on a substrate;

a gate insulating layer arranged on the gate electrode;

a transparent semiconductor activation layer of a first transparent semiconductor material arranged on the gate insulating layer and having source and drain regions arranged therein;

doping layers of a second transparent semiconductor material arranged in at least parts of the source and drain regions on the transparent activation layer and having a same doping type as that of the source and drain regions and having a same doping concentration as that of the source and drain regions; and

transparent source electrodes and drain electrodes arranged in at least one region of the regions in which the doping layers are arranged.

26. A method of manufacturing a transparent Thin Film Transistor (TFT), the method comprising:

forming a gate electrode;

forming a gate insulating layer on the gate electrode;

forming a transparent semiconductor activation layer of first transparent semiconductor on the gate insulating layer and having source and drain regions formed therein;

forming doping layers of a second transparent semiconductor in at least parts of the source and drain regions on the transparent semiconductor activation layer and having a same doping type as that of the source and drain regions and having a doping concentration different from that of the source and drain regions;

etching the doping layers to divide them into two regions; and

forming transparent source and drain electrodes on the doping layers.

27. The method as claimed in claim 26, wherein the doping layers are doped by an in-situ method in which a gas containing impurities is sprayed in an apparatus used for forming the transparent semiconductor activation layer.

28. The method as claimed in claim 27, wherein a recess etching method of etching the upper part of the transparent activation layer to a predetermined thickness is used in etching the doping layers.