System to transfer a template transfer body between a motion stage and a docking plate
First Claim
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1. A system comprising:
- a docking system;
a motion stage spaced-apart from said docking system a first distance, said motion stage having a range of motion associated therewith, with a periphery of said range of motion being spaced-apart from said docking system said first distance; and
a body, having first and second opposed sides spaced-apart a second distance, selectively coupled between said docking system and said motion stage, with said first distance being greater than said second distance to minimize a probability of a collision between any of said docking system, said motion stage, and said body while transferring said body between said docking system and said motion stage.
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Abstract
The present is directed towards an imprint lithography system including, inter alia, a docking plate; a motion stage having a range of motion associated therewith, the range of motion having a periphery spaced-apart from the docking plate a first distance; and a body, having first and second opposed sides spaced-apart a second distance, selectively coupled between the docking plate and the motion stage, the first distance being greater than the second distance to minimize a probability of a collision between the docking plate, the motion stage and the body while transferring the body between the docking plate and the motion stage.
100 Citations
21 Claims
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1. A system comprising:
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a docking system;
a motion stage spaced-apart from said docking system a first distance, said motion stage having a range of motion associated therewith, with a periphery of said range of motion being spaced-apart from said docking system said first distance; and
a body, having first and second opposed sides spaced-apart a second distance, selectively coupled between said docking system and said motion stage, with said first distance being greater than said second distance to minimize a probability of a collision between any of said docking system, said motion stage, and said body while transferring said body between said docking system and said motion stage. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9)
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10. A system comprising:
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a docking system;
a motion stage spaced-apart from said docking system a first distance, said motion stage having a range of motion associated therewith, with a periphery of said range of motion being spaced-apart from said docking system said first distance; and
a body, having first and second opposed sides spaced-apart a second distance, selectively coupled between said docking system and said motion stage, with said first distance being greater than said second distance to minimize a kinetic energy present while transferring said body between said docking system and said motion stage. - View Dependent Claims (11, 12, 13, 14, 15)
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16. An imprint lithography system comprising:
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a docking system comprising a docking body and a docking plate having an arm coupled therebetween, said arm in communication with a motor to position said docking plate between first and second positions, said second position being spaced-apart from said docking body a first distance;
a motion stage spaced-apart from said docking system a second distance, said motion stage having a range of motion associated therewith, with a periphery of said range of motion being spaced-apart from said docking system said second distance; and
a body selectively coupled between said docking system and said motion stage, with said first and second distances being established to minimize a probability of a collision between any of said docking system, said motion stage and said body while transferring said body between said docking system and said motion stage. - View Dependent Claims (17, 18, 19, 20, 21)
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Specification