Reflector with non-uniform metal oxide layer surface

• US 20070072409A1
• Filed: 09/23/2005
• Published: 03/29/2007
• Est. Priority Date: 09/23/2005
• Status: Active Grant

• Current Assignee: Hewlett-Packard Development Company, L.P. (HP Inc.)
• Original Assignee: Hewlett-Packard Development Company, L.P. (HP Inc.)
• Inventors: Ulmer, Kurt, Tiessen, Terrance
• Granted Patent: US 7,575,810 B2
• Time in Patent Office: Days
• US Class Current: 438/622
• CPC Class Codes: C23C 14/081 of aluminium, magnesium or beryllium
• CPC Class Codes: F21V 7/22 characterised by materials, surface treatments or coatings, e.g. dichroic reflectors

Abstract

A reflector includes a non-uniform metal oxide layer surface.

Claims

1. A method comprising:

providing a metal oxide layer having a reflectivity of less than or equal to about 10 percent; and

non-uniformly etching the metal oxide layer.

2. The method of claim 1, wherein providing a metal oxide layer comprises sputter depositing a transition metal onto a substrate in an oxygen deficient atmosphere.

3. The method of claim 1 further comprising forming a non-uniform mask layer on the metal oxide layer prior to etching.

4. The method of claim 3, wherein the mask layer is selected from a group of materials consisting of:

gold, silver, palladium, platinum, titanium, nickel, and copper.

5. The method of claim 1 further comprising applying an interface layer onto the etched metal oxide layer.

6. The method of claim 5, wherein applying the interface layer comprises spinning an interface layer onto the etched metal oxide layer.

7. The method of claim 6, wherein the interface layer includes material selected from a group of materials consisting of:

spun-on glass,

methylsiloxane silicate, sodium silicate, TEOS, and SOL-GEL material.

8. The method of claim 5 further comprising forming an optical coating on the interface layer.

9. The method of claim 1, wherein the metal oxide is selected from a group of oxides of metals consisting of oxides of:

aluminum, chromium, iron, titanium, nickel and copper.

10. The method of claim 1, wherein the metal oxide is aluminum oxide.

11. The method of claim 10, wherein the metal oxide layer is upon an aluminum substrate.

12. The method of claim 1, wherein the etched metal oxide layer has a surface roughness of at least about 0.1 micrometers.

13. The method of claim 1, wherein the etched metal oxide layer has a surface roughness of less than about 1 micrometer.

26. The reflector of claim 1 further comprising an ellipsoidal substrate supporting the metal oxide layer.

14. A reflector comprising:

a non-uniformly etched metal oxide layer.

15. The reflector of claim 14, wherein the metal oxide layer has a surface roughness of at least about 0.1 micrometers.

16. The reflector of claim 14, wherein the metal oxide layer has a surface roughness of less than about 1 micrometer.

17. The reflector of claim 14 further comprising a mask layer upon the metal oxide layer.

18. The reflector of claim 17 further comprising an interface layer upon the metal oxide layer and upon the mask layer.

19. The reflector of claim 18, wherein the interface layer is a spun-on glass.

20. The reflector of claim 18, wherein the interface layer includes material selected from a group of materials consisting of:

spun-on glass,

methylsiloxane silicate, sodium silicate, TEOS, and sol-gel material.

21. The reflector of claim 14 further comprising:

an interface layer upon the metal oxide layer; and

an optical layer on the interface layer.

22. The reflector of claim 14, wherein the metal oxide layer is selected from a group of oxides of metals consisting of oxides of:

aluminum, chromium, iron, titanium, nickel, and copper.

23. The reflector of claim 14, wherein the metal oxide is aluminum oxide and wherein the aluminum oxide layer is supported by an aluminum substrate.

24. The reflector of claim 14 further comprising:

an aluminum substrate supporting the metal oxide layer.

25. The reflector of claim 14, wherein the reflector is configured to support a burner.

27. The reflector of claim 14, wherein the reflector is configured to direct light towards a light modulator.

28. A projector comprising:

a lamp including;

a substrate;

a non-uniformly etched metal oxide layer on the substrate;

an interface layer on the metal oxide layer;

an optical coating on the interface layer; and

a burner proximate the optical coating; and

a light modulator.

29. A method comprising:

providing a metal oxide layer having a reflectivity less than or equal to about 10 percent; and

a step for forming non-uniform pores on a surface of the metal oxide layer.

30. A reflector comprising:

absorptive means for reducing reflectivity to less than about 10 percent using a non-uniform surface roughness of a metal oxide;

means for reflecting visible light while passing non-visible light to the absorptive means; and

means for interfacing the absorptive means to the means for reflecting visible light.