METHODS AND APPARATUS FOR POSITIONING A SUBSTRATE RELATIVE TO A SUPPORT STAGE
First Claim
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1. A pushing device, comprising:
- a pusher adapted to;
extend toward an edge of a substrate that is supported by a stage;
contact the edge of the substrate while the substrate is supported by the stage; and
continue extending so as to cause the substrate to translate relative to the stage toward one or more stops until the substrate contacts the one or more stops;
wherein the pushing device further comprises a biasing device coupled to the pusher of the pushing device and adapted to move the pusher toward the edge of the substrate; and
wherein the pushing device further comprises a retracting device coupled to the pusher of the pushing device and adapted to counteract the biasing device so as to move the pusher away from the edge of the substrate.
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Abstract
In a first aspect, a substrate positioning system includes a plurality of pushers arranged in a spaced relation about a stage adapted to support a substrate. Each pusher is adapted to assume a retracted position so as to permit the substrate to be loaded onto and unloaded from the stage, extend toward an edge of the substrate that is supported by the stage, contact the edge of the substrate, and continue extending so as to cause the substrate to move relative to the stage until the substrate is calibrated to the stage. Numerous other aspects are provided.
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Citations
19 Claims
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1. A pushing device, comprising:
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a pusher adapted to;
extend toward an edge of a substrate that is supported by a stage;
contact the edge of the substrate while the substrate is supported by the stage; and
continue extending so as to cause the substrate to translate relative to the stage toward one or more stops until the substrate contacts the one or more stops;
wherein the pushing device further comprises a biasing device coupled to the pusher of the pushing device and adapted to move the pusher toward the edge of the substrate; and
wherein the pushing device further comprises a retracting device coupled to the pusher of the pushing device and adapted to counteract the biasing device so as to move the pusher away from the edge of the substrate. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8)
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9. A method of adjusting a position of a substrate relative to a stage that supports the substrate, comprising:
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providing a plurality of pushers and stops in a spaced relation around a stage that is adapted to support a substrate;
causing each pusher to extend toward an edge of the substrate;
causing each pusher to contact the edge of the substrate; and
causing each pusher to continue extending so as to cause the substrate to translate relative to the stage toward one or more of the stops until the substrate contacts the one or more stops;
wherein each pushing device further comprises a biasing device coupled to the pusher of the pushing device and adapted to move the pusher toward the edge of the substrate; and
wherein each pushing device further comprises a retracting device coupled to the pusher of the pushing device and adapted to counteract the biasing device so as to move the pusher away from the edge of the substrate. - View Dependent Claims (10, 11, 12, 13, 14, 15)
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16. A computer program product comprising:
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a medium readable by a computer, the computer readable medium having computer program code adapted to;
cause a plurality of pushers to extend toward an edge of a substrate, wherein the plurality of pushers and a plurality of stops are provided in a spaced relation around a stage that is adapted to support the substrate;
cause each pusher to extend toward the edge of the substrate;
cause each pusher to contact the edge of the substrate; and
cause each pusher to continue extending so as to cause the substrate to translate relative to the stage toward one or more of the stops until the substrate contacts the one or more stops;
wherein each pushing device further comprises a biasing device coupled to the pusher of the pushing device and adapted to move the pusher toward the edge of the substrate; and
wherein each pushing device further comprises a retracting device coupled to the pusher of the pushing device and adapted to counteract the biasing device so as to move the pusher away from the edge of the substrate. - View Dependent Claims (17, 18, 19)
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Specification