ELECTROSTATIC PARTICLE BEAM DEFLECTOR

• US 20070075887A1
• Filed: 10/03/2005
• Published: 04/05/2007
• Est. Priority Date: 10/03/2005
• Status: Active Grant

• Current Assignee: Applied Materials Incorporated
• Original Assignee: Applied Materials Incorporated
• Inventors: Stovall, Scott, Lozes, Richard
• Granted Patent: US 7,209,055 B1
• Time in Patent Office: Days
• US Class Current: 341/155
• CPC Class Codes: B82Y 10/00 Nanotechnology for information processing, storage or transmission, e.g. quantum computing or single electron logic
• CPC Class Codes: B82Y 40/00 Manufacture or treatment of nanostructures
• CPC Class Codes: H01J 37/3174 Particle-beam lithography, e.g. electron beam lithography
• CPC Class Codes: H03M 1/1038 by storing corrected or correction values in one or more digital look-up tables H03M1/1057 takes precedence
• CPC Class Codes: H03M 1/66 Digital/analogue converters H03M1/001 – H03M1/10 take precedence

Abstract

An electrostatic deflector for a particle beam apparatus comprises opposing deflector plates that face one another across a particle beam gap and are electrostatically chargeable. Each deflector plate comprises its own voltage driver, which has a DAC and amplifier. Digital electronics receives an input digital code that expresses the complementary voltages to be applied to opposing deflector plates. When the input digital code is determined to provide a non-linear output response voltage from a DAC, the digital electronics provides an output digital code with a different digital code that provides a linear response from the DAC while providing the same differential voltage between the first and second deflector plates.

Claims

1. An electrostatic deflector for a particle beam apparatus, the electrostatic deflector comprising:

(a) first and second deflector plates that face one another across a particle beam gap, the deflector plates being electrostatically chargeable;

(b) a first voltage driver comprising a first DAC to convert a first digital code to a first analog voltage signal, and a first amplifier to amplify the first output analog voltage signal to generate a first voltage to be applied to the first deflector plate;

(c) a second voltage driver comprising a second DAC to convert a second digital code to a second analog voltage signal, and a second amplifier to amplify the second analog voltage signal to generate a second voltage to be applied to the second deflector plate, the second voltage being substantially complementary to the first voltage to maintain a selected differential voltage between the first and second deflector plates; and

(d) digital electronics to receive an input digital code that expresses the first and second voltages to be applied to the first and second deflector plates, and substitute the input digital code with an output digital code such that;

(i) when the input digital code is determined to provide a linear output response voltage from the first or second DAC, the output digital code is maintained the same as the input digital code; and

(ii) when the input digital code is determined to provide a non-linear output response voltage from the first or second DAC, the output digital code is substituted with a different digital code that provides a linear response from the first or second DAC while providing the same differential voltage between the first and second deflector plates.

2. A deflector according to claim 1 wherein the digital electronics looks up a lookup table to determine if the input digital code is associated with a substitute digital code that is a different digital code, where the substitute digital code is a digital code that bypasses the non-linear response region of the first or second DAC while still maintaining the same differential voltage between the first and second deflector plates.

3. A deflector according to claim 1 wherein the output digital code comprises a first output bit code for the first DAC and a second output bit code for the second DAC.

4. A deflector according to claim 3 wherein the first and second output bits codes express first and second voltages that are substantially complementary.

5. A deflector according to claim 1 wherein the input digital code comprises a first input bit code that expresses the first voltage and a second input bit code that expresses the second voltage.

6. A deflector according to claim 1 wherein the substitute digital code is selected to avoid a segment boundary of digital codes applied to the first or second DAC.

7. A deflector according to claim 1 further comprising:

(e) third and fourth deflector plates that face one another across a particle beam gap, the third and fourth deflector plates being electrostatically chargeable and positioned orthogonal to the first and second deflector plates;

(f) a third voltage driver comprising a third DAC to convert a third digital code to a third analog voltage signal, and a third amplifier to amplify the third analog voltage signal to generate a third voltage to be applied to the third deflector plate;

(g) a fourth voltage driver comprising a fourth DAC to convert a first digital code to a fourth analog voltage signal, and a fourth amplifier to amplify the fourth analog voltage signal to generate a fourth voltage to be applied to the fourth deflector plate, the fourth voltage being complementary to the third voltage to maintain another selected differential voltage between the third and fourth deflector plates; and

wherein the digital electronics receives another input digital code that expresses the third and fourth voltages to be applied to the third and fourth deflector plates, and substitutes the input digital code with an output digital code such that;

(i) when the input digital code is determined to provide a linear output response voltage from the third or fourth DAC, the output digital code is maintained the same as the input digital code; and

(ii) when the input digital code is determined to provide a non-linear output response voltage from the third or fourth DAC, the output digital code is substituted with a different digital code that provides a linear response from the third or fourth DAC while providing the same differential voltage between the first and second deflector plates.

10. A deflector according to claim 11 wherein the first and second bits codes express first and second voltages that are substantially complementary.

11. A deflector according to claim 1 wherein the substitute digital code is selected to avoid a segment boundary of the digital codes applied to the first or second DAC.

8. An electrostatic deflector for a particle beam apparatus, the electrostatic deflector comprising:

(a) first and second deflector plates that face one another across a particle beam gap, the deflector plates being electrostatically chargeable;

(b) a first voltage driver to provide a first voltage to the first deflector plate, the first voltage driver comprising a first DAC to convert a first digital code to a first analog voltage signal which is passed to a first amplifier to generate a first voltage to be applied to the first deflector plate; and

(c) a second voltage driver to provide a second voltage to the second plate that is complementary to the first voltage, the second voltage driver comprising a second DAC to convert a second digital code to a second analog voltage signal which is passed to a second amplifier to generate a second voltage to be applied to the second deflector plate; and

(d) digital electronics to receive an input digital code that expresses the first and second voltages to be applied to the first and second deflector plates, and when the input digital code is determined to provide a non-linear output response voltage from the first or second DAC, substitute the input digital code with an output digital code that provides a linear response from the first or second DAC while providing the same differential voltage between the first and second deflector plates.

9. An electrostatic deflector for a particle beam apparatus, the electrostatic deflector comprising:

(a) first and second deflector plates that face one another across a particle beam gap, the deflector plates being electrostatically chargeable;

(b) a first voltage driver comprising a first DAC capable of converting a first digital code to a first analog voltage signal which is passed to a first amplifier to generate a first voltage to be applied to the first deflector plate; and

(c) a second voltage driver comprising a second DAC to convert a second digital code to a second analog voltage signal which is passed to a second amplifier to generate a second voltage to be applied to the second deflector plate, the second voltage being complementary to the first voltage; and

(d) digital electronics to (i) receive an input digital code that expresses the first and second voltages to be applied to the first and second deflector plates, (ii) determine if the input digital code is listed in a lookup table and associated with a substitute input digital code which bypasses any non-linear output response voltage of the first or second DAC, (iii) generate an output digital code which is either the input digital code or the substitute digital code, (iv) look up a translation table that associates each output digital code with a first bit code for the first DAC and a second bit code for the second DAC, and (v) pass the first bit code to the first DAC and the second bit code to the second DAC.

12. A cascaded electrostatic deflector for a particle beam apparatus, the cascaded electrostatic deflector comprising:

(a) an upper deflector comprising;

(i) a pair of opposing upper deflector plates that are electrostatically chargeable and face one another across a particle beam gap;

(ii) a first upper voltage driver comprising a first DAC to convert a first digital code to a first analog voltage signal, and a first amplifier to amplify the first output analog voltage signal to generate a first voltage to be applied to the one of the deflector plates; and

(iii) a second upper voltage driver comprising a second DAC to convert a second digital code to a second analog voltage signal, and a second amplifier to amplify the second analog voltage signal to generate a second voltage to be applied to the other deflector plate, the second voltage being substantially complementary to the first voltage to maintain a selected differential voltage between the deflector plates;

(b) a lower deflector comprising;

(i) a pair of opposing lower deflector plates that are electrostatically chargeable and face one another across a particle beam gap;

(ii) a first lower voltage driver comprising a first DAC to convert a first digital code to a first analog voltage signal, and a first amplifier to amplify the first output analog voltage signal to generate a first voltage to be applied to a lower deflector plate; and

(iii) a second lower voltage driver comprising a second DAC to convert a second digital code to a second analog voltage signal, and a second amplifier to amplify the second analog voltage signal to generate a second voltage to be applied to the other lower deflector plate, the second voltage being substantially complementary to the first voltage to maintain a selected differential voltage between the opposing deflector plates; and

(c) digital electronics to receive an input digital code that expresses the voltages to be applied to each upper and lower deflector plate, and substitute the input digital code with an output digital code such that;

(i) when the input digital code is determined to provide a linear output response voltage from a DAC, the output digital code is maintained the same as the input digital code; and

(ii) when the input digital code is determined to provide a non-linear output response voltage from the DAC, the output digital code is substituted with a different digital code that provides a linear response from the DAC while providing the same differential voltage between a pair of opposing upper or lower deflector plates.

13. A cascaded deflector according to claim 12 wherein the digital electronics looks up a lookup table to determine if the input digital code is associated with a substitute digital code that is a different digital code, where the substitute digital code is a digital code that bypasses the non-linear response region of the DAC while still maintaining the same differential voltage between a pair of opposing deflector plates.

14. A cascaded deflector according to claim 13 wherein in each of the upper and lower deflectors, the output digital code comprises a first output bit code for the first DAC and a second output bit code for the second DAC.

15. A cascaded deflector according to claim 14 wherein the first and second output bits codes express first and second voltages that are substantially complementary.

16. A deflector according to claim 14 the input digital code comprises a first input bit code that expresses the first voltage and a second input bit code that expresses the second voltage.

17. A deflector according to claim 12 wherein the substitute digital code is selected to avoid a segment boundary of digital codes applied to a DAC.

18. A multifunction deflector system comprising a plurality of sets of cascaded deflectors, the multifunction deflector system comprising:

(a) a first cascaded deflector set comprising first and second deflectors that are stacked one below the other, the first and second deflectors comprising pairs of opposing deflector plates that are each powered by a separate voltage driver comprising a DAC;

(b) a second cascaded deflector set comprising third and fourth deflectors that are stacked one below the other;

the third and fourth deflectors comprising pairs of opposing deflector plates that are each powered by a separate voltage driver comprising a DAC; and

(c) digital electronics to receive an input digital code that expresses the voltages to be applied to each of the deflector plates, and substitute the input digital code with an output digital code such that;

(i) when the input digital code is determined to provide a linear output response voltage from a DAC of a voltage driver, the output digital code is maintained the same as the input digital code, and

(ii) when the Input digital code is determined to provide a non-linear output response voltage from the upper or lower DAC, the output digital code is substituted with a different digital code that provides a linear response from a DAC of the voltage driver while providing the same differential voltage between a pair of opposing deflector plates.

19. A multifunction deflector system according to claim 18 wherein each deflector comprises four orthogonal deflector plates, each deflector plate being powered by a voltage driver.

20. A multifunction deflector system according to claim 18 wherein the deflector plates are similarly sized and positioned at 90°

to each other around a square which extends about the location of a particle beam passing through the deflector.

21. A multifunction deflector system according to claim 18 wherein the first cascaded deflector set operates to accurately shape and size a flash produced by an electron beam.

22. A multifunction deflector system according to claim 18 wherein the second cascaded deflector set provides microvector displacement of the shaped electron beam flash across a substrate.

23. A multifunction deflector system according to claim 18 wherein wherein each deflector provides (2M−

1) states and wherein each cascaded deflector provides 2*(2M−

1)−

1−

4M−

3 states.

24. A multifunction deflector system according to claim 18 wherein each DAC comprises an N-bit resolution and wherein N-bit resolution DACS are extended to provide resolutions of N+2 bits in the cascaded deflectors.