Method for verification of particles having a sensor area and sensor arrangement for carrying out this method
First Claim
1. A method for verification of particles (16), in which a sensor area (15) is made available, on which the particles (16) to be verified accumulate when they are present, and in which the characteristics of the sensor area (15) are monitored with respect to one parameter which varies on the basis of the accumulation of the particles (16), wherein a plurality of sensor areas (15) are made available, and are sensitive to particles (16) with different characteristics.
1 Assignment
0 Petitions
Accused Products
Abstract
The invention relates to a method for verification of particles, in particular of nanoparticles (16), in which a sensor area (15) is made available for this purpose, on which the particles can accumulate. The invention also relates to a sensor arrangement having a sensor area (15) which is suitable for carrying out the method mentioned. The invention provides for a plurality of sensor areas (15) to be arranged, on which particles which each have different characteristics can accumulate. For example, this makes it possible to classify nanoparticles (16) of different size, thus advantageously allowing a statement to be made on the size distribution of the nanoparticles (16) in a nanopowder.
7 Citations
20 Claims
-
1. A method for verification of particles (16), in which a sensor area (15) is made available, on which the particles (16) to be verified accumulate when they are present, and in which the characteristics of the sensor area (15) are monitored with respect to one parameter which varies on the basis of the accumulation of the particles (16),
wherein a plurality of sensor areas (15) are made available, and are sensitive to particles (16) with different characteristics.
- 6. A sensor arrangement having a sensor area (15) on which particles (16) to be verified accumulate when they are present, and having a monitoring apparatus (24, 25, 26) for the sensor area (15), by means of which it is possible to determine a change in one parameter of the sensor area (15) on the basis of the accumulation of the particles (16), wherein a plurality of sensor areas (15) are provided, and are sensitive to particles (16) with different characteristics.
Specification