×

Micro-machined acoustic wave accelerometer

  • US 20070079656A1
  • Filed: 10/11/2005
  • Published: 04/12/2007
  • Est. Priority Date: 10/11/2005
  • Status: Abandoned Application
First Claim
Patent Images

1. An acceleration sensing apparatus, comprising:

  • a piezoelectric substrate that functions as a propagation medium;

    a diaphragm configured upon said substrate, wherein said diaphragm is etched to form at least one etched cavity thereof; and

    a plurality of sensing elements formed on said diaphragm, wherein a first sensing element among said plurality of sensing elements is located on a top of said diaphragm, a second sensing element among said plurality of sensing elements is located on a side of said diaphragm, and a third sensing element among said plurality of sensing elements is located at a crystallography different orientation with respect to said first and second sensing elements, such that said substrate, said diaphragm and said plurality of sensing elements comprise a micro-machined acceleration sensing apparatus thereof that is clamped at one end of said substrate to an object under an acceleration and submitted to a force at said free end of said substrate to provide signals indicative of acceleration.

View all claims
  • 1 Assignment
Timeline View
Assignment View
    ×
    ×