METHOD OF CHARACTERIZING A CHAMBER BASED UPON CONCURRENT BEHAVIOR OF SELECTED PLASMA PARAMETERS AS A FUNCTION OF SOURCE POWER, BIAS POWER AND CHAMBER PRESSURE
First Claim
1. A method of operating a plasma reactor chamber with respect to plasma parameters selected from a group comprising ion density, wafer voltage, etch rate, wafer current, by controlling chamber parameters of source power, bias power and chamber pressure, said method comprising:
- characterizing the reactor chamber by performing the steps of;
a. for each one of said selected chamber parameters, ramping the level of the one chamber parameter while sampling RF electrical parameters at an RF bias power input to said wafer support pedestal and computing from each sample of said RF electrical parameters the values of the plasma parameters, and storing said values with the corresponding levels of said one chamber parameter as corresponding chamber parameter data;
b. for each one of said selected chamber parameters, deducing, from the corresponding chamber parameter data, a single variable function for each of said plural plasma parameters having said one chamber parameter as an independent variable;
c. constructing combinations of said functions and from said combinations, constructing surfaces defining simultaneous values of all of said selected chamber parameters, each respective surface corresponding to a respective constant value of one of said plural plasma parameters, and storing said surfaces.
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Abstract
The invention involves a method of characterizing a plasma reactor chamber through the behavior of plasma parameters selected from a group comprising ion density, wafer voltage, etch rate, wafer current, as functions of chamber parameters of source power, bias power and chamber pressure. The method begins by performing two steps for each one of the selected chamber parameters. The first step consists of ramping the level of the one chamber parameter while sampling RF electrical parameters at an RF bias power input to said wafer support pedestal and computing from each sample of said RF electrical parameters the values of the plasma parameters. These values are stored with the corresponding levels of the one chamber parameter as corresponding chamber parameter data. The second step consists of deducing, from the corresponding chamber parameter data, a single variable function for each of the plural plasma parameters having said one chamber parameter as an independent variable. The method continues with constructing combinations of these functions that are three variable functions having each of the chamber parameters as a variable. Then, from each three-variable function, the method constructs a set of surfaces, each individual surface corresponding to a respective constant value of the corresponding plasma parameter and defining simultaneous values of all of the selected chamber parameters. These surfaces are stored in memory for later use in controlling the chamber during wafer processing.
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23 Claims
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1. A method of operating a plasma reactor chamber with respect to plasma parameters selected from a group comprising ion density, wafer voltage, etch rate, wafer current, by controlling chamber parameters of source power, bias power and chamber pressure, said method comprising:
characterizing the reactor chamber by performing the steps of;
a. for each one of said selected chamber parameters, ramping the level of the one chamber parameter while sampling RF electrical parameters at an RF bias power input to said wafer support pedestal and computing from each sample of said RF electrical parameters the values of the plasma parameters, and storing said values with the corresponding levels of said one chamber parameter as corresponding chamber parameter data;
b. for each one of said selected chamber parameters, deducing, from the corresponding chamber parameter data, a single variable function for each of said plural plasma parameters having said one chamber parameter as an independent variable;
c. constructing combinations of said functions and from said combinations, constructing surfaces defining simultaneous values of all of said selected chamber parameters, each respective surface corresponding to a respective constant value of one of said plural plasma parameters, and storing said surfaces. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10, 11, 12, 13, 14, 15, 16, 17, 18, 19, 20, 21, 22, 23)
Specification