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SCRIBING AND BREAKING APPARATUS AND SYSTEM THEREFOR

  • US 20070080187A1
  • Filed: 10/03/2006
  • Published: 04/12/2007
  • Est. Priority Date: 01/17/2001
  • Status: Active Grant
First Claim
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1. A separation apparatus, comprising:

  • first and second scribing means for scribing front and rear surfaces, respectively, of a mother substrate made of a brittle material, the first and second scribing means being opposed to each other and being provided on an upper side and a lower side of the mother substrate, respectively; and

    a first and a second transferring means for separately transferring the first and second scribing means, respectively, in the same orthogonal directions relative to a direction of scribe lines formed by the first and second scribing means in scribing the front and rear surfaces, the orthogonal directions being substantially horizontal.

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