SCRIBING AND BREAKING APPARATUS AND SYSTEM THEREFOR
First Claim
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1. A separation apparatus, comprising:
- first and second scribing means for scribing front and rear surfaces, respectively, of a mother substrate made of a brittle material, the first and second scribing means being opposed to each other and being provided on an upper side and a lower side of the mother substrate, respectively; and
a first and a second transferring means for separately transferring the first and second scribing means, respectively, in the same orthogonal directions relative to a direction of scribe lines formed by the first and second scribing means in scribing the front and rear surfaces, the orthogonal directions being substantially horizontal.
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Abstract
A separation apparatus comprising a first and a second scribing means for scribing front and rear surfaces of a first mother substrate made of a brittle material along first predetermined scribing lines previously provided on the front and rear surfaces of the first mother substrate, the first and second scribing means being opposed to each other on an upper side and a lower side, and a holding and transferring means for holding and transferring the first mother substrate so that the first predetermined scribing lines of the first mother substrate are located between the first and second scribing means.
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1 Claim
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1. A separation apparatus, comprising:
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first and second scribing means for scribing front and rear surfaces, respectively, of a mother substrate made of a brittle material, the first and second scribing means being opposed to each other and being provided on an upper side and a lower side of the mother substrate, respectively; and
a first and a second transferring means for separately transferring the first and second scribing means, respectively, in the same orthogonal directions relative to a direction of scribe lines formed by the first and second scribing means in scribing the front and rear surfaces, the orthogonal directions being substantially horizontal.
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Specification