SEMICONDUCTOR DEVICE
First Claim
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1. A semiconductor device comprising:
- a substrate;
a first oxide film lying on the substrate;
a thin semiconductor film lying on the first oxide film;
a first terminal formed on the semiconductor film;
a second terminal formed on the semiconductor film;
a semiconductor element formed on the semiconductor film and electrically connected between the first and second terminals; and
a protective diode formed on the semiconductor film and electrically connected in between the second and first terminal in a forward direction.
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Abstract
A semiconductor device includes a substrate, a first oxide film lying on the substrate, a thin semiconductor film lying on the first oxide film, a first terminal formed on the semiconductor film, a second terminal formed on the semiconductor film, a semiconductor element formed on the semiconductor film and electrically connected between the first and second terminals, and a protective diode formed on the semiconductor film and electrically connected in between the second and first terminal in a forward direction.
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Citations
9 Claims
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1. A semiconductor device comprising:
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a substrate;
a first oxide film lying on the substrate;
a thin semiconductor film lying on the first oxide film;
a first terminal formed on the semiconductor film;
a second terminal formed on the semiconductor film;
a semiconductor element formed on the semiconductor film and electrically connected between the first and second terminals; and
a protective diode formed on the semiconductor film and electrically connected in between the second and first terminal in a forward direction. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9)
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Specification