Micromirror systems with electrodes configured for sequential mirror attraction

• US 20070081225A1
• Filed: 12/04/2006
• Published: 04/12/2007
• Est. Priority Date: 10/11/2002
• Status: Active Grant

• Current Assignee: SK Hynix Inc.
• Original Assignee: Christopher Aubuchon
• Inventors: Aubuchon, Christopher
• Granted Patent: US 7,518,781 B2
• Time in Patent Office: Days
• US Class Current: 359/291
• CPC Class Codes: G02B 26/06 for controlling the phase of light G02B26/08 takes precedence , measuring optical phase difference G01J9/00
• CPC Class Codes: G02B 26/0833 the reflecting element being a micromechanical device, e.g. a MEMS mirror, DMD G02B26/0825 takes precedence; micromechanical devices in general B81B
• CPC Class Codes: G02B 26/0841 the reflecting element being moved or deformed by electrostatic means

Abstract

Micromirror devices, especially for use in digital projection are disclosed. Other applications are contemplated as well. The devices employ a superstructure that includes a mirror supported over a hinge set above a substructure. Various improvements to the superstructure over known micromirror devices are provided. The features described are applicable to improve manufacturability, enable further miniaturization of the elements and/or to increase relative light return. Devices can be produced utilizing the various optional features described herein, possibly offering cost savings, lower power consumption, and higher resolution.

Claims

1. A micromirror device comprising:

a substrate with electrical components including address circuitry, and

a micromechanical light modulator element comprising

a mirror portion above the substrate,

a plurality of hinge portions separated below the mirror portion, and

means, formed between the substrate and the mirror, for sequentially attracting the mirror portion.

2. The device of claim 1, wherein the means for sequentially attracting the mirror portion further comprises a plurality of electrodes.

3. The device of claim 1, wherein said electrical components are configured to operate the mirror portion in a bistable manner.

4. The device of claim 2, wherein the plurality of electrodes are provided by continuous members.

5. The device of claim 4, wherein at least one of said continuous members is curved.

6. The device of claim 2, wherein each of said plurality of electrodes comprises discrete members.

7. The device of claim 6, wherein said discrete members are electrically connected and set at different heights with respect to a surface of the substrate.

8. The device of claim 2, wherein said plurality of electrodes are angled with respect to a substrate surface.

9. The device of claim 2, wherein said plurality of electrodes comprise at least two heights substantially parallel to a surface of the substrate.

10. The device of claim 2, wherein said plurality of electrodes comprise at least three heights substantially parallel to a surface of the substrate.

11. A micromirror device comprising:

a substrate with electrical components including address circuitry, and

a micromechanical light modulator element comprising

a mirror portion above the substrate

a plurality of hinge portions separated below the mirror portion, and an electrode means, formed between the substrate and the mirror, for sequentially attracting the mirror portion.

12. The device of claim 11, wherein the electrode means further comprises a plurality of electrodes.

13. The device of claim 11, wherein said electrical components are configured to operate the mirror portion in a bistable manner.

14. The device of claim 12, wherein the plurality of electrodes are provided by continuous members.

15. The device of claim 14, wherein at least one of said continuous members is curved.

16. The device of claim 12, wherein each of said plurality of electrodes comprises discrete members.

17. The device of claim 16, wherein said discrete members are electrically connected and set at different heights with respect to a surface of the substrate.

18. The device of claim 12, wherein said plurality of electrodes are angled with respect to a substrate surface.

19. The device of claim 12, wherein said plurality of electrodes comprise at least two heights substantially parallel to a surface of the substrate.

20. The device of claim 12, wherein said plurality of electrodes comprise at least three heights substantially parallel to a surface of the substrate.

21. A micromechanical device comprising:

a substrate with electrical components including address circuitry, and

a micromechanical system comprising

a micromechanical structure portion above the substrate,

a plurality of hinge portions separated below the micromechanical structure portion, and

means, formed between the substrate and a micromechanical structure portion, for sequentially attracting the micromechanical structure portion.

22. The device of claim 21, wherein the means for sequentially attracting the micromechanical structure portion further comprises a plurality of electrodes.

23. The device of claim 21, wherein said electrical components are configured to operate the micromechanical structure portion in a bistable manner.

24. The device of claim 22, wherein the plurality of electrodes are provided by continuous members.

25. The device of claim 24, wherein at least one of said continuous members is curved.

26. The device of claim 22, wherein each of said plurality of electrodes comprises discrete members.

27. The device of claim 26, wherein said discrete members are electrically connected and set at different heights with respect to a surface of the substrate.

28. The device of claim 22, wherein said plurality of electrodes are angled with respect to a substrate surface.

29. The device of claim 22, wherein said plurality of electrodes comprise at least two heights substantially parallel to a surface of the substrate.

30. The device of claim 22, wherein said plurality of electrodes comprise at least three heights substantially parallel to a surface of the substrate.

31. A micromechanical device comprising:

a substrate with electrical components including address circuitry, and

a micromechanical system comprising

a micromechanical structure portion above the substrate

a plurality of hinge portions separated below the micromechanical structure portion, and an electrode means, formed between the substrate and the micromechanical structure portion, for sequentially attracting the micromechanical structure portion.

32. The device of claim 31, wherein the electrode means further comprises a plurality of electrodes.

33. The device of claim 31, wherein said electrical components are configured to operate the micromechanical structure portion in a bistable manner.

34. The device of claim 32, wherein the plurality of electrodes are provided by continuous members.

35. The device of claim 34, wherein at least one of said continuous members is curved.

36. The device of claim 32, wherein each of said plurality of electrodes comprises discrete members.

37. The device of claim 36, wherein said discrete members are electrically connected and set at different heights with respect to a surface of the substrate.

38. The device of claim 32, wherein said plurality of electrodes are angled with respect to a substrate surface.

39. The device of claim 32, wherein said plurality of electrodes comprise at least two heights substantially parallel to a surface of the substrate.

40. The device of claim 32, wherein said plurality of electrodes comprise at least three heights substantially parallel to a surface of the substrate.

41. A micromirror device comprising:

a substrate with electrical components including address circuitry, and

an array of micromechanical light modulator elements,

each micromechanical light modulator element comprising a mirror portion having a center portion separated above said substrate, a plurality of hinge portions separated below each said mirror portion and three or more electrode portions, wherein said electrode portions are provided adjacent said substrate and said mirror portion is provided adjacent said electrode portions, a first portion of each electrode being adjacent the substrate and distal to the center of the mirror portion and another portion of the electrode being vertically above the first portion of the electrode and proximal to the center of the mirror portion, thereby providing clearance for and sequential attraction of said mirror portion by said electrode portions.

42. The device of claim 41, wherein said electrical components are configured to operate the mirror portion in a bistable manner.

43. The device of claim 41, wherein the three or more electrode portions are provided by continuous members.

44. The device of claim 43, wherein at least one of said continuous members are curved.

45. The device of claim 41, wherein each portion of the electrode comprises discrete members.

46. The device of claim 45, wherein said discrete members are electrically connected and set at different heights with respect to a surface of the substrate.

47. The device of claim 41, wherein the three or more electrode portions are angled with respect to a substrate surface.

48. The device of claim 41, wherein the three or more electrode portions comprise at least two heights substantially parallel to a surface of the substrate.

49. The device of claim 41, wherein the three or more electrode portions comprise at least three heights substantially parallel to a surface of the substrate.

50. A method for forming micromechanical device comprising:

forming a substrate with electrical components including address circuitry;

forming a micromechanical structure portion above the substrate;

forming a plurality of hinge portions separated below the micromechanical structure portion; and

forming, using a single mask, an electrode having at least two portions between the substrate and a micromechanical structure portion, for sequentially attracting the micromechanical structure portion.

51. A micromirror device comprising:

a substrate with electrical components including address circuitry, and

an array of micromechanical light modulator elements,

each micromechanical light modulator element comprising a mirror portion having a center portion separated above said substrate, a plurality of hinge portions separated below each said mirror portion and three or more electrode portions, wherein said electrode portions are provided adjacent said substrate and said mirror portion is provided adjacent said electrode portions, a first portion of each electrode being adjacent the substrate and proximal to the center of the mirror portion and another portion of the electrode being vertically below the first portion of the electrode and distal to the center of the mirror portion, thereby providing clearance for and sequential attraction of said mirror portion by said electrode portions.

52. The device of claim 51, wherein said electrical components are configured to operate the mirror portion in a bistable manner.

53. The device of claim 51, wherein the three or more electrode portions are provided by continuous members.

54. The device of claim 53, wherein at least one of said continuous members is curved.

55. The device of claim 51, wherein each portion of the electrode comprises discrete members.

56. The device of claim 55, wherein said discrete members are electrically connected and set at different heights with respect to a surface of the substrate.

57. The device of claim 51, wherein the three or more electrode portions are angled with respect to a substrate surface.

58. The device of claim 51, wherein the three or more electrode portions comprise at least two heights substantially parallel to a surface of the substrate.

59. The device of claim 51, wherein the three or more electrode portions comprise at least three heights substantially parallel to a surface of the substrate.