Miniature Silicon Condenser Microphone
First Claim
Patent Images
1. A method for producing a MEMS transducer, the method comprising:
- providing a spacer;
providing and attaching a cover to the spacer;
joining a printed circuit board to the cover and the spacer to form a housing with a chamber;
providing an aperture within the housing, the aperture adapted to acoustically couple a signal external to the housing into the chamber; and
disposing a transducer within the chamber.
0 Assignments
0 Petitions
Accused Products
Abstract
A silicon condenser microphone package includes a transducer unit, a substrate, and a cover. The substrate includes an upper surface transducer unit is attached to the upper surface of the substrate and overlaps at least a portion of the recess wherein a back volume of the transducer unit is formed between the transducer unit and the substrate. The cover is placed over the transducer unit and either the cover or the substrate includes an aperture.
-
Citations
43 Claims
-
1. A method for producing a MEMS transducer, the method comprising:
-
providing a spacer;
providing and attaching a cover to the spacer;
joining a printed circuit board to the cover and the spacer to form a housing with a chamber;
providing an aperture within the housing, the aperture adapted to acoustically couple a signal external to the housing into the chamber; and
disposing a transducer within the chamber. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10, 11, 12, 13, 14, 40)
-
-
15. A method for producing a MEMS transducer, the method comprising:
-
providing a substrate, the substrate comprising a first insulating layer, a first conductive layer, and an aperture;
coupling a transducer to the substrate overlapping the aperture to form at least a portion of a cavity for the transducer;
providing and attaching a cover to the substrate to enclose and protect the transducer, the cover comprising a second insulating layer and a second conductive layer; and
joining the first conductive layer and the second conductive layer to form a shield against electromagnetic interference. - View Dependent Claims (16, 17, 18, 41)
-
-
19. A method for producing a MEMS transducer, the method comprising:
-
providing a housing, the housing being an assembly of at least a substrate portion and a cover portion, the housing defining a sealed chamber;
forming an aperture within the housing acoustically coupling the chamber to an exterior portion of the housing for receiving a signal;
providing a transducer within the chamber; and
electrically shielding the transducer from electromagnetic interference. - View Dependent Claims (20, 21, 22, 23, 24, 25, 26, 27, 28, 29, 30, 31, 32, 33, 34, 35, 36, 37, 42)
-
-
38. A method for producing a MEMS transducer, the method comprising:
-
providing a printed circuit board comprising at least one layer of conductive material and at least one layer of insulating material;
providing a cover comprising at least one layer of conductive material;
providing and cooperating a spacer to the cover and the printed circuit board to form a housing, the spacer comprising a sidewall at least partially covered by a conductive layer, the conductive layer including a portion of an inner lining for providing a shield against an electromagnetic interference;
forming an aperture within the housing adapted for receiving a signal; and
mounting a transducer within the housing.
-
-
39. A method for producing a MEMS transducer, the method comprising:
providing a substrate including an upper surface having a recess formed within, the substrate comprising a layer of conductive material;
mounting a transducer to the upper surface overlapping at least a portion of the recess so that a back volume is formed between the transducer and the substrate;
placing a cover over the transducer, the cover comprising an aperture and a layer of conductive material;
providing and cooperating a spacer to the cover and the substrate to form a housing, the spacer comprising a conductive material; and
wherein the conductive layers electrically coupled to form an inner lining for providing a shield against an electromagnetic interference;
providing a sealing ring, the sealing ring formed on a surface of the substrate opposite the upper surface adjacent the back volume.
-
43. A method for producing a MEMS transducer, the method comprising:
-
providing a substrate, the substrate comprising a first insulating layer and a first conductive layer;
providing a cover comprising a conductive material;
providing a cavity within the cover or the substrate or both the cover and the substrate;
providing and joining the substrate and the cover to form a housing;
mounting a transducer within the housing; and
providing and attaching a sealing ring to the housing adjacent the cavity.
-
Specification