MEMS SENSOR PACKAGE LEAK TEST
First Claim
1. A method for detecting a leak in a MEMS sensor package, wherein the MEMS sensor package includes a sensor cavity that encloses a MEMS sensor, wherein the MEMS sensor includes a mechanical oscillating element with a Quality (Q) value, the method comprising:
- measuring a first Q value of the MEMS sensor at a first time;
applying a pressure differential between the sensor cavity and the exterior of the MEMS sensor package; and
measuring a second Q value of the MEMS sensor at a second time, wherein the second time is later than the first time.
1 Assignment
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Accused Products
Abstract
Methods and apparatus are provided for detecting leaks in a MEMS sensor package, and in particular, a MEMS sensor package that includes an oscillating structure or element that has a Quality (Q) value. The method and apparatus may include measuring the Q value of the MEMS sensor at a first time, applying a pressure to the outside of the MEMS sensor package, and measuring the Q value of the MEMS sensor at a second time after pressure has been applied for a period of time. A change in the measured Q values between the first time and the second time may be determined, which may then be correlated to a leak rate for the particular MEMS sensor package. In some cases, a leak rate of 2×10−13 He atm.cc/s or less may be detected.
25 Citations
30 Claims
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1. A method for detecting a leak in a MEMS sensor package, wherein the MEMS sensor package includes a sensor cavity that encloses a MEMS sensor, wherein the MEMS sensor includes a mechanical oscillating element with a Quality (Q) value, the method comprising:
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measuring a first Q value of the MEMS sensor at a first time;
applying a pressure differential between the sensor cavity and the exterior of the MEMS sensor package; and
measuring a second Q value of the MEMS sensor at a second time, wherein the second time is later than the first time. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10, 11, 12, 13, 14, 15, 16, 17)
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18. A method for detecting a leak in a MEMS sensor package, wherein the MEMS sensor package includes a sensor cavity that encloses a MEMS sensor, wherein the MEMS sensor includes a mechanical oscillating element with a Quality (Q) value, the method comprising:
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waiting for a period of time;
measuring the Q value of the MEMS sensor; and
using the measured Q value to determine if the MEMS sensor package has an unacceptable leak rate. - View Dependent Claims (19, 20, 21, 22, 27, 28, 29, 30)
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23-26. -26. (canceled)
Specification