Adaptive plasma source for generating uniform plasma
First Claim
1. An adaptive plasma source arranged at an upper portion of a reaction chamber having a reaction space to form plasma and supplied with RF (radio frequency) power from an external RF power source to form an electric field inside the reaction space, the adaptive plasma source comprising:
- a conductive bushing coupled to the RF power source and arranged at an upper central portion of the reaction chamber; and
at least two unit coils branched from the bushing, the unit coils surrounding the bushing in a spiral shape and having the number of turns equal to a×
(b/m), where a and b are positive integers and m is the number of the unit coils.
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Abstract
There is provided an adaptive plasma source, which is arranged at an upper portion of a reaction chamber having a reaction space to form plasma and is supplied with RF (radio frequency) power from an external RF power source to form an electric field inside the reaction space. The adaptive plasma source includes a conductive bushing and at least two unit coils. The bushing is coupled to the RF power source and arranged at an upper central portion of the reaction chamber. The at least two unit coils are branched from the bushing and surround the bushing in a spiral shape and have the number of turns equal to a×(b/m), where a and b are positive integers and m is the number of the unit coils.
392 Citations
11 Claims
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1. An adaptive plasma source arranged at an upper portion of a reaction chamber having a reaction space to form plasma and supplied with RF (radio frequency) power from an external RF power source to form an electric field inside the reaction space, the adaptive plasma source comprising:
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a conductive bushing coupled to the RF power source and arranged at an upper central portion of the reaction chamber; and
at least two unit coils branched from the bushing, the unit coils surrounding the bushing in a spiral shape and having the number of turns equal to a×
(b/m), where a and b are positive integers and m is the number of the unit coils. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8)
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9. An adaptive plasma source arranged at an upper portion of a reaction chamber having a reaction space to form plasma and supplied with RF (radio frequency) power from an external RF power source to form an electric field inside the reaction space, the adaptive plasma source comprising:
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a first conductive bushing arranged at an upper central portion of the reaction chamber on a first plane disposed on an upper portion of the reaction chamber;
at least two first unit coils branched from the first bushing on the first plane, the first unit coils surrounding the first bushing in a spiral shape and having the number of turns equal to a×
(b/m1), where a and b are positive integers and m1 is the number of the first unit coils;
a second conductive bushing arranged corresponding to the first bushing on a second plane located higher than the first plane, the second conductive bushing being elastically connected to the first bushing; and
at least two second unit coils branched from the second bushing on the second plane, the second unit coils surrounding the second bushing in a spiral shape and having the number of turns equal to a×
(b/m2), where a and b are positive integers and m2 is the number of the second unit coils. - View Dependent Claims (10, 11)
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Specification