Exposure apparatus and exposure method, maintenance method, and device manufacturing method
First Claim
Patent Images
1. An exposure apparatus for exposing a substrate, comprising:
- a supply outlet that supplies a liquid to an optical path space of exposure light; and
a liquid supply apparatus that supplies an ionized ionic liquid to the supply outlet.
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Accused Products
Abstract
An exposure apparatus includes; a supply outlet that supplies a liquid to an optical path space of exposure light, and a liquid supply system that supplies an ionized ionic liquid to the supply outlet.
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Citations
59 Claims
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1. An exposure apparatus for exposing a substrate, comprising:
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a supply outlet that supplies a liquid to an optical path space of exposure light; and
a liquid supply apparatus that supplies an ionized ionic liquid to the supply outlet. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10, 18, 19)
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11. An exposure apparatus for exposing a substrate, comprising:
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a first supply outlet that supplies a positive ion liquid to an optical path space of exposure light, and a second supply outlet that supplies a negative ion liquid to the optical path space. - View Dependent Claims (20)
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12. An exposure apparatus for exposing a substrate, comprising:
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a first supply outlet that supplies an ionized ionic liquid to an optical path space of exposure light, and a second supply outlet that supplies a non ionized non ionic liquid to the optical path space. - View Dependent Claims (21)
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13. An exposure apparatus for exposing a substrate, comprising:
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an immersion mechanism that fills an optical path space of exposure light with a liquid, and a cleaning mechanism that cleans a predetermined member being in contact with the liquid, with an ionized ionic liquid. - View Dependent Claims (14, 15, 16, 17, 22)
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23. An exposure method for exposing a substrate, comprising:
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supplying an ionized ionic liquid to an optical path space of exposure light, and irradiating the substrate with the exposure light via a liquid, the liquid being filled in the optical path space. - View Dependent Claims (24, 25, 26, 27, 28, 29, 30)
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31. A maintenance method for an exposure apparatus that exposes a substrate, the method comprising:
cleaning a predetermined member with an ionized ionic liquid, the member being in contact with a liquid filled in an optical path space of exposure light. - View Dependent Claims (32, 33)
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34. An exposure apparatus for exposing a substrate, comprising:
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an immersion mechanism that fills an optical path space of exposure light with a liquid, and an antistatic device that prevents a charge of bubbles, the bubbles being generated in the liquid. - View Dependent Claims (35, 44, 45, 49)
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36. An exposure apparatus for exposing a substrate, comprising:
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an immersion mechanism that fills an optical path space of exposure light with a liquid, and an antistatic device that prevents a charge of the liquid to thereby suppress defective exposure attributable to bubbles in the liquid. - View Dependent Claims (37, 38, 39, 40, 41, 42, 43, 50)
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46. An exposure apparatus for exposing a substrate, comprising:
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an immersion mechanism that fills an optical path space of exposure light with a liquid, and a prevention apparatus that prevents defective exposure due to charged bubbles in the liquid. - View Dependent Claims (47, 48, 51)
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52. An exposure method for exposing a substrate, comprising:
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supplying a liquid to an optical path space of exposure light, preventing bubbles in the liquid being charged to thereby suppress defective exposure due to bubbles in the liquid in the optical path space. - View Dependent Claims (53, 55, 57)
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54. An exposure method for exposing a substrate, comprising:
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supplying a liquid to an optical path space of exposure light, and preventing charging of the liquid to thereby suppress defective exposure due to bubbles in the liquid in the optical path space. - View Dependent Claims (58)
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56. An exposure method for exposing a substrate, comprising:
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supplying a liquid to an optical path space of exposure light, and preventing charging of the liquid or bubbles in the liquid to thereby suppress a situation where bubbles remain in the liquid in the optical path space. - View Dependent Claims (59)
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Specification