Method of manufacturing a wire grid polarizer

• US 20070087549A1
• Filed: 10/16/2006
• Published: 04/19/2007
• Est. Priority Date: 10/17/2005
• Status: Active Grant

• Current Assignee: Asahi Kasei Kabushiki Kaisha (Asahi Kasei Corporation)
• Original Assignee: Asahi Kasei Kabushiki Kaisha (Asahi Kasei Corporation)
• Inventors: Yamaki, Hiroshi, Kawazu, Yasuyuki, Sato, Yusuke, Namatame, Takuji
• Granted Patent: US 8,927,056 B2
• Time in Patent Office: Days
• US Class Current: 438/613
• CPC Class Codes: G02B 5/3058 comprising electrically conductive elements, e.g. wire grids, conductive particles

Abstract

A dielectric layer 2 is formed on a region including grid-shaped convex portions 1a of a resin substrate 1 having the grid-shaped convex portions 1a with pitches of 80 nm to 120 nm on its surface, and metal wires 3 are formed on the dielectric layer 2. It is thereby possible to obtain a wire grid polarizer having a microstructural concavo-convex grid with pitches of the level of 120 nm or less that has not been implemented.

Claims

1. A method of manufacturing a wire grid polarizer, comprising the steps of:

forming a dielectric layer on a region including grid-shaped convex portions of a resin substrate having the grid-shaped convex portions on a surface thereof; and

forming metal wires on the dielectric layer.

2. The method of manufacturing a wire grid polarizer according to claim 1, wherein in the step of forming the dielectric layer, the dielectric layer is formed to cover the grid-shaped convex portions of the resin substrate and at least part of side faces of the portions.

3. The method of manufacturing a wire grid polarizer according to claim 1, wherein pitches of the grid-shaped convex portions on the surface of the resin substrate are less than or equal to 120 nm.

4. The method of manufacturing a wire grid polarizer according to claim 1, wherein the resin substrate is prepared by performing uniaxial drawing on a drawing target member with a concavo-convex grid with pitches of 100 nm to 100 μ

m on its surface, in the direction substantially parallel to a longitudinal direction of the concavo-convex grid, with a width of the drawing target member made free in the direction substantially perpendicular to the longitudinal direction.

5. The method of manufacturing a wire grid polarizer according to claim 1, wherein a grid shaped convex portion is applied to a resin substrate by transferring a microstructual concavo-convex grid to the resin substrate, using a mold that is made by performing uniaxial drawing on a drawing target member with a concavo-convex grid with pitches of 100 nm to 100 μ

m on its surface, in the direction substantially parallel to a longitudinal direction of the concavo-convex grid, with a width of the drawing target member made free in the direction substantially perpendicular to the longitudinal direction.

6. The method of manufacturing a wire grid polarizer according to claim 1, wherein the resin substrate is shaped using a mold having grid-shaped convex portions.

7. The method of manufacturing a wire grid polarizer according to claim 1, wherein the grid-shaped convex portions have a height 0.5 time to 2.0 times pitches of the grid-shaped convex portions.

8. The method of manufacturing a wire grid polarizer according to claim 1, wherein the dielectric layer has a thickness ranging from 2 nm to 200 nm.

9. The method of manufacturing a wire grid polarizer according to claim 1, wherein the metal wires have a height ranging from 120 nm to 220 nm.

10. The method of manufacturing a wire grid polarizer according to claim 1, wherein in the step of forming the metal wires, the metal wires are formed by depositing metal in the direction of a 300 or less angle formed between the normal of the plane of the substrate and a source of vapor deposition within a plane perpendicularly intersecting a longitudinal direction of a grid of the grid-shaped convex portions.