Management system for semiconductor manufacturing equipment

• US 20070090953A1
• Filed: 05/10/2006
• Published: 04/26/2007
• Est. Priority Date: 10/24/2005
• Status: Active Grant

• Current Assignee: Samsung Electronics Co. Ltd.
• Original Assignee: Samsung Electronics Co. Ltd.
• Inventors: Park, Jin-Woo, Park, Hyoung-Min, Hwang, Young-Hak, Park, Yong-Bum, Park, Hong-Jin
• Granted Patent: US 7,319,912 B2
• Time in Patent Office: Days
• US Class Current: 340/572.1
• CPC Class Codes: G05B 19/4183 characterised by data acquisition, e.g. workpiece identification
• CPC Class Codes: G05B 19/41855 by local area network [LAN], network structure
• CPC Class Codes: G05B 2219/31095 Read write intelligent chip on workpiece, pallet, tool for data exchange
• CPC Class Codes: G05B 2219/31162 Wireless lan
• CPC Class Codes: G05B 2219/31281 Calculate optimum path for conveying workpieces
• CPC Class Codes: G05B 2219/31286 Detect position of articles and equipment by receivers, identify objects by code
• CPC Class Codes: G05B 2219/33199 Transponder
• CPC Class Codes: G05B 2219/45031 Manufacturing semiconductor wafers
• CPC Class Codes: G06Q 10/08 Logistics, e.g. warehousing, loading or distribution; Inventory or stock management
• CPC Class Codes: G06Q 50/04 Manufacturing
• CPC Class Codes: Y02P 90/02 Total factory control, e.g. smart factories, flexible manufacturing systems [FMS] or integrated manufacturing systems [IMS]
• CPC Class Codes: Y02P 90/30 Computing systems specially adapted for manufacturing

Abstract

A management system for semiconductor manufacturing equipment in a manufacturing facility is provided. The system includes a host computer communicating with a tracking server, the tracking server communicating with a wireless network adapted to communicate with a radio tag associated with a wafer cassette. The tracking server is adapted to receive status information from the radio tag via the wireless network, to derive location or movement information for the wafer cassette from the status information, and to determining an optimal transfer path for the wafer cassette through the manufacturing facility.

Claims

1. A management system for semiconductor manufacturing equipment in a manufacturing facility, the system comprising:

a host computer communicating with a tracking server, the tracking server communicating with a wireless network adapted to communicate with a radio tag associated with a wafer cassette;

wherein the tracking server is adapted to receive status information from the radio tag via the wireless network, to derive location or movement information for the wafer cassette from the status information, and to determining an optimal transfer path for the wafer cassette through the manufacturing facility.

2. The management system of claim 1, wherein the wireless network and the radio tag are compatible with a ZigBee wireless communication system.

3. The management system of claim 2, wherein the wireless network comprises a ZigBee coordinator connected to the tracking server, and a plurality of ZigBee routers wirelessly to the ZigBee coordinator and wirelessly communicating with the radio tag.

4. The management system of claim 3, wherein the plurality of ZigBee routers are configured in a mesh structure extending from the ZigBee coordinator.

5. The management system of claim 4, wherein each one of the plurality of ZigBee routers comprises a full function router adapted to receive status information from the radio tag and acts as a repeater to realize multiple communication channels between the ZigBee coordinator and the radio tag.

6. The management system of claim 4, wherein the ZigBee coordinator is installed within the manufacturing facility proximate multiple pieces of manufacturing equipment, and comprises;

a hardwired local area network (LAN) connection to the tracking server; and

,

a coordinator antenna adapted to facilitate wireless communication with the plurality of ZigBee routers.

7. The management system of claim 6, wherein the ZigBee coordinator is installed in a bottom portion of an equipment bay or gateway providing an unobstructed wireless communications path to the plurality of ZigBee routers.

8. The management system of claim 7 wherein the ZigBee coordinator further comprises a plurality of display lamps adapted to indicate an operating status.

9. The management system of claim 2, wherein the radio tag comprises a ZigBee communication module adapted for use within a ZigBee wireless communication system and comprising:

a tag microprocessor running software adapted to derive the status information in response to a poling signal received from a ZigBee router;

a function key adapted to provide restricted commands to the tag microprocessor;

a display device adapted to display information input to or output from the tag microprocessor; and

,

an auxiliary power supply device adapted to power the ZigBee communication module.

10. The management system of claim 9, wherein the ZigBee communication module further comprises:

an antenna adapted to facilitate the wireless communication of data to and from the plurality of ZigBee routers, a ZigBee RF transceiver adapted to demodulate a wireless signal received from the antenna and modulate information onto a wireless signal broadcast from the antenna; and

,

a module microprocessor providing information from the demodulated signal to the tag microprocessor.

11. The management system of claim 9, wherein the tag microprocessor comprises:

an associated memory adapted to temporally or permanently store status information; and

,

a console board enabling input of control signals by an external operator to the tag microprocessor.

12. The management system of claim 9, wherein the function key comprises at least one push button.

13. The management system of claim 9, wherein the display device is temporarily turned in response to an operator inquiry.

14. The management system of claim 9, wherein the display device comprises a color liquid crystal display comprising a built-in controller connected to the tag microprocessor via an 8-bit control bus.

15. The management system of claim 9, wherein the auxiliary power supply device comprises a re-chargeable lithium polymer battery.

16. The management system of claim 9, wherein the radio tag is mounted in a plastic housing on the wafer cassette.

17. The management system of claim 16, wherein the radio tag comprises an associated barcode located on the plastic housing.

18. The management system according to claim 16, wherein the plastic housing comprises a cradle holding the radio tag.

19. The management system according to claim 18, wherein the cradle holds an inserted radio tag in such a manner as to protrude from the plastic housing.

20. The management system according to claim 18, wherein the cradle is formed of a transparent material.