Preparation of a PH sensor, the prepared PH sensor, system comprising the same and measurement using the system

• US 20070095663A1
• Filed: 03/09/2006
• Published: 05/03/2007
• Est. Priority Date: 11/01/2005
• Status: Abandoned Application

• Current Assignee: National Yunlin University of Science and Technology
• Original Assignee: National Yunlin University of Science and Technology
• Inventors: Chou, Jung-Chuan, Yen, Chih-Hsien
• Application Number:
  US11/372,629
• Publication Number:
  US 20070095663A1
• Time in Patent Office: Days
• US Class Current: 204/433
• CPC Class Codes: G01N 27/414 Ion-sensitive or chemical field-effect transistors, i.e. ISFETS or CHEMFETS

Abstract

Preparation of a pH sensor, the prepared pH sensor, system comprising the same, and measurement using the system. The pH sensor is an extended gate field effect transistor (EGFET) structure. The preparation includes the steps of providing an extended gate ion sensitive field effect transistor comprising an extended gate region, forming a titanium nitride film on the extended gate region by RF sputtering deposition to obtain a pH sensor.

Claims

1. A preparation method of a pH sensor which is an extended gate ion-sensitive field effect transistor structure, the method comprising the steps of:

providing an extended gate ion sensitive field effect transistor comprising an extended gate region; and

forming a titanium nitride film on the extended gate region by radio frequency (RF) sputtering deposition to obtain a pH sensor;

wherein the RF sputtering deposition is performed with a titanium target under conditions of a mixture of Ar and N₂ at a ratio of 1;

2 to 1;

5 and a flow rate of 60-90 sccm, a pressure of 0.01 to 0.04 torr, and a power of 85 to 120 W.

2. The preparation method as claimed in claim 1, wherein the ratio of Ar and N₂is 1:

5.

3. The preparation method as claimed in claim 1, wherein the flow rate of the mixture is 60 sccm.

4. The preparation method as claimed in claim 1, wherein the pressure is 0.02 torr.

5. The preparation method as claimed in claim 1, wherein the power is 100 W.

6. A pH sensor with an extended gate field effect transistor structure, comprising:

a metal oxide semiconductor field effect transistor (MOSFET);

an extended gate as a sensing unit, comprising a substrate, and a titanium nitride film thereon;

a conductive wire connecting the MOSFET and the sensing unit; and

an insulating layer covering the surface of the sensing unit and exposing the titanium nitride film.

7. The pH sensor as claimed in claim 6, wherein the MOSFET is n-type.

8. The pH sensor as claimed in claim 6, wherein the substrate is a silicon (100) substrate.

9. The pH sensor as claimed in claim 6, wherein the substrate is of an electric resistance of 8 to 12 Ω

·

cm.

10. The pH sensor as claimed in claim 6, wherein the substrate is of a size of 0.5×

0.5 cm².

11. The pH sensor as claimed in claim 6, wherein the conducting wire is aluminum.

12. The pH sensor as claimed in claim 6, wherein the insulating layer is epoxy resin.

13. A system of measuring pH value in a solution, comprising

a pH sensor as claimed in claim 6;

a reference electrode supplying stable voltage;

a semiconductor characteristic instrument connecting the pH sensor and the reference electrode respectively;

a temperature controller comprising a temperature control center, a thermocouple, and a heater, wherein the temperature control center connects the thermocouple and the heater, respectively; and

a light-isolation container isolating the sensing unit of the pH sensor from photosensitive effect;

wherein measurement of pH value of a solution comprising;

pouring a solution into the light-isolation container;

immersing the sensing unit of the pH sensor, the reference electrode, and the thermocouple in the solution;

adjusting temperature of the solution by the heater controlled by the temperature control center after detecting temperature variation in the solution by the thermocouple;

transmitting measurement data from the pH sensor and the reference electrode to the semiconductor characteristic instrument; and

reading out current-voltage (I-V) values of the solution by the semiconductor characteristic instrument to obtain pH value of the solution.

14. The system as claimed in claim 13, wherein the semiconductor characteristic instrument is Keithley 236.

15. The system as claimed in claim 13, wherein the temperature controller is controlled at 25°

C.

16. The system as claimed in claim 13, wherein the reference electrode is Ag/AgCl reference electrode.

17. The system as claimed in claim 13, wherein the light-isolation container is a dark box.

18. A method of measuring sensitivity of a pH sensor using the system as claimed in claim 13, comprising the steps of:

(a) immersing the sensing unit of the pH sensor in an acidic or basic solution;

(b) recording a curve of source/drain current versus gate voltage of the pH sensor by the semiconductor characteristic instrument after altering pH values of the acidic or basic solution at a fixed temperature; and

(c) examining the curve to obtain a sensitivity of the pH sensor at the fixed temperature and a fixed current.

19. The method as claimed in claim 18, wherein the acidic or basic solution has pH value from 1 to 13.

20. The method as claimed in claim 18, wherein the semiconductor characteristic instrument supplies a voltage from 0 to 6 V to a gate of the metal oxide semiconductor field effect transistor of the extended gate field effect transistor.

21. The method as claimed in claim 18, wherein the semiconductor characteristic instrument supplies a fixed voltage of 0.2 V to a source/drain of the metal oxide semiconductor field effect transistor of the extended gate field effect transistor.

22. The method as claimed in claim 18, wherein the acidic or basic solution has a temperature of 25°

C. controlled by the temperature controller.

23. The method as claimed in claim 18, wherein the reference electrode is an Ag/AgCl reference electrode.