×

Utility transfer apparatus, stage apparatus, exposure apparatus, and device manufacturing method

  • US 20070095739A1
  • Filed: 10/23/2006
  • Published: 05/03/2007
  • Est. Priority Date: 10/24/2005
  • Status: Abandoned Application
First Claim
Patent Images

1. A utility transfer apparatus, comprising:

  • a magnetic member being secured to a first member;

    a first coil provided on the first member and wound on the magnetic member; and

    a second coil provided on a second member and wound on the magnetic member so that the second member is movable relative to the first member, wherein the magnetic member forms a magnetic circuit that does not have an air gap.

View all claims
  • 1 Assignment
Timeline View
Assignment View
    ×
    ×