Utility transfer apparatus, stage apparatus, exposure apparatus, and device manufacturing method

• US 20070095739A1
• Filed: 10/23/2006
• Published: 05/03/2007
• Est. Priority Date: 10/24/2005
• Status: Abandoned Application

• Current Assignee: Nikon Corporation
• Original Assignee: Nikon Corporation
• Inventors: Ebihara, Akimitsu
• Application Number:
  US11/584,633
• Publication Number:
  US 20070095739A1
• Time in Patent Office: Days
• US Class Current: 210/222
• CPC Class Codes: H01F 17/06 with core substantially closed in itself, e.g. toroid
• CPC Class Codes: H01F 27/24 Magnetic cores
• CPC Class Codes: H01F 29/10 having movable part of magnetic circuit high leakage transformers H01F38/08; dynamo-electric machines with movable part of magnetic circuit H02K23/44, H02K23/48
• CPC Class Codes: H01F 3/00 Cores, Yokes, or armatures magnetic materials H01F1/00; permanent magnets H01F7/02

Abstract

A utility transfer apparatus includes: a magnetic member being secured to a first member; a first coil provided on the first member and wound on the magnetic member; and a second coil provided on a second member and wound on the magnetic member so that the second member is movable relative to the first member. The magnetic member forms a magnetic circuit that does not have an air gap.

Claims

1. A utility transfer apparatus, comprising:

a magnetic member being secured to a first member;

a first coil provided on the first member and wound on the magnetic member; and

a second coil provided on a second member and wound on the magnetic member so that the second member is movable relative to the first member, wherein

the magnetic member forms a magnetic circuit that does not have an air gap.

2. The utility transfer apparatus according to claim 1, wherein a prescribed gap is formed between the second coil and the magnetic member.

3. The utility transfer apparatus according to claim 1, wherein the magnetic member includes silicon steel.

7. The utility transfer apparatus according to claim 1, wherein the first member and the second member relatively rotationally move about an axis of rotation.

8. The utility transfer apparatus according to claim 7, wherein the first member and the second member are provided with a hinge part and freely fold up.

21. A stage apparatus that comprises a utility transfer apparatus according to claim 1.

22. The stage apparatus according to claim 21, further comprising:

a first mover, and a second mover capable of relative movement with respect to the first mover, wherein

the utility transfer apparatus transfers utilities between the first mover and the second mover.

24. An exposure apparatus that comprises a stage apparatus according to claim 21.

4. The utility transfer apparatus according to clam 1, wherein the magnetic member is divided between a winding part of the first coil and a winding part of the second coil by interposing a magnetic fluid.

5. The utility transfer apparatus according to claim 4, wherein

a prescribed gap is formed between the second coil and the magnetic member, and

the magnetic fluid expands and contracts by at least a distance being same as the prescribed gap.

6. The utility transfer apparatus according to claim 4, wherein the magnetic fluid includes a liquid in which magnetite or Mn—

Zn compound ferrites, silicon steel, and kerosene have been dispersed in water.

9. A utility transfer apparatus, comprising:

a first member,

a second member that is movable relative to the first member;

a magnetic member that is secured to one of the first member or the second member and forms a closed magnetic circuit;

a first coil that is provided on the first member and is wound on the magnetic member, and

a second coil that is provided on the second member and is wound on the magnetic member so as to be capable of relative movement with respect to the magnetic member.

10. The utility transfer apparatus according to claim 9, wherein a prescribed gap is formed between the second coil and the magnetic member.

11. The utility transfer apparatus according to claim 9, wherein the magnetic member is provided in an undivided status.

12. The utility transfer apparatus according to claim 9, wherein the magnetic member includes silicon steel.

13. The utility transfer apparatus according to claim 9, wherein the magnetic member is divided between a ding part of the first coil and a winding part of the second coil by interposing a magnetic fluid.

14. The utility transfer apparatus according to claim 13, wherein

a prescribed gap is formed between the second coil and the magnetic member, and

the magnetic fluid expands and contract by at least a distance being same as the prescribed gap.

15. The utility transfer apparatus according to claim 13, wherein the magnetic fluid includes a liquid in which magnetite or Mn—

Zn compound ferrites, silicon steel, and kerosene have been dispersed in water.

16. The utility transfer apparatus according to claim 9, wherein the first member and the second member relatively rotationally move about an axis of rotation.

18. The utility transfer apparatus according to claim 9, wherein the second coil is able to move along a don of the magnetic circuit formed on the magnetic member.

19. The utility transfer a according to claim 9, wherein the second coil is able to move in a crossing direction to a direction of the magnetic circuit formed on the magnetic member.

23. An exposure apparatus that comp a utility transfer apparatus according to claim 9.

25. A device manufacturing method that use an exposure apparatus according to claim 23.

17. The utility transfer apparatus according to clam 16, wherein the first member and the second member are provided with a hinge part and freely fold up.

20. A utility transfer apparatus, comprising:

a first member;

a second member that is movable relative to the first member,

a magnetic member that is secured to one of the first member or the second member;

a first coil that is provided on the first member and is wound on the magnetic member, and

a second coil that is provided on the second member and is wound on the magnetic member so that the second member is movable relative to the first member, wherein

the second coil moves in a crossing direction to a direction of a magnetic circuit formed on a part of the magnetic member on which the second coil is wound.