Spatial light modulator, lithographic apparatus and device manufacturing method
First Claim
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1. A patterning device, comprising:
- an array of light modulating elements disposed on a support, the light modulating elements configured to modulate a radiation beam; and
a control circuit configured to position respective ones of the light modulating elements according to a desired pattern, the control circuit coupled to an opposite side of the support than the light modulating elements, and the control circuit comprising a digital-to-analog converter, an analog-to-digital converter, an optical fiber input, and a processor.
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Abstract
A spatial light modulator used to pattern a radiation beam comprises an array of pixels disposed on a support. Each pixel has a light modulating element for modulating the radiation beam and a control circuit that positions the light modulating elements according to a desired pattern. The control circuit is disposed on the opposite side of the support than the light modulating elements. The control circuit comprises at least one of a digital to analog converter, an analog to digital converter, an optical fiber input, and a processor.
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Citations
11 Claims
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1. A patterning device, comprising:
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an array of light modulating elements disposed on a support, the light modulating elements configured to modulate a radiation beam; and
a control circuit configured to position respective ones of the light modulating elements according to a desired pattern, the control circuit coupled to an opposite side of the support than the light modulating elements, and the control circuit comprising a digital-to-analog converter, an analog-to-digital converter, an optical fiber input, and a processor. - View Dependent Claims (2, 3, 4)
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5. A lithographic apparatus, comprising:
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an illumination system configured to condition a beam of radiation;
an array of individually controllable elements disposed on a support, respective ones of the individually controllable elements being configured to pattern the beam of radiation;
a control circuit configure to position respective ones of the individually controllable elements according to a desired pattern, the control circuit coupled to an opposite side of the support than the individually controllable elements, and the control circuit comprising a digital-to-analog converter, an analog-to-digital converter, an optical fiber input, and a processor; and
a projection system configured to project the patterned beam onto a target portion of a substrate. - View Dependent Claims (6, 7, 8)
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9. A device manufacturing method, comprising:
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(a) patterning a beam of radiation using an array of individually controllable elements disposed on a support;
(b) positioning respective ones of the individually controllable elements according to a desired pattern using a control circuit, the control circuit comprising a digital-to-analog converter, an analog-to-digital converter, an optical-to-electrical converter, and a processor, and the control circuit being coupled to an opposite side of the support than the individually controllable elements; and
(c) projecting the patterned beam onto a target portion of a substrate using a projection system. - View Dependent Claims (10, 11)
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Specification