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Deposition of enhanced seed layer using tantalum alloy based sputter target

  • US 20070099032A1
  • Filed: 11/02/2005
  • Published: 05/03/2007
  • Est. Priority Date: 11/02/2005
  • Status: Abandoned Application
First Claim
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1. A magnetic recording medium, comprising:

  • a substrate;

    a seedlayer deposited over said substrate, said seedlayer comprised of tantalum (Ta) and an alloying element;

    an underlayer deposited over said seedlayer; and

    a magnetic data-storing granular layer deposited over said underlayer, wherein solubility of the alloying element in a body centered cubic tantalum (Ta) phase does not exceed 10 atomic percent at room temperature, and wherein the alloying element has a mass susceptibility of less than or equal to 1.5×

    10-7





    m3kg.

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