Process for electroless copper deposition

• US 20070099422A1
• Filed: 10/28/2005
• Published: 05/03/2007
• Est. Priority Date: 10/28/2005
• Status: Abandoned Application

• Current Assignee: Applied Materials Incorporated
• Original Assignee: Applied Materials Incorporated
• Inventors: Shanmugasundram, Arulkumar, Weidman, Timothy, Wijekoon, Kapila
• Application Number:
  US11/261,409
• Publication Number:
  US 20070099422A1
• Time in Patent Office: Days
• US Class Current: 438/687
• CPC Class Codes: C23C 18/165 Multilayered product layered product B32B
• CPC Class Codes: C23C 18/40 using reducing agents
• CPC Class Codes: C25D 3/38 of copper
• CPC Class Codes: H01L 21/288 from a liquid, e.g. electrolytic deposition
• CPC Class Codes: H01L 21/76844 Bottomless liners
• CPC Class Codes: H01L 21/76846 Layer combinations
• CPC Class Codes: H01L 21/76862 Bombardment with particles, e.g. treatment in noble gas plasmas; UV irradiation
• CPC Class Codes: H01L 21/76864 Thermal treatment
• CPC Class Codes: H01L 21/76874 for electroless plating
• CPC Class Codes: H01L 21/76879 by selective deposition of conductive material in the vias, e.g. selective C.V.D. on semiconductor material, plating plating on semiconductors in general H01L21/288
• CPC Class Codes: H01L 2221/1089 Stacks of seed layers

Abstract

Embodiments of the invention provide a method for depositing a copper material on a substrate by an electroless deposition process and also provide a composition of an electroless deposition solution. In one embodiment, the copper material is deposited from an electroless copper solution that contains an additive, such as an inhibitor, to promote a bottom-up fill process. In one aspect, the field of the substrate may be maintained free of copper material or substantially free of copper material during the electroless deposition process. Prior to the electroless deposition process for forming the copper material, a barrier layer may be deposited on the substrate, and thereafter, a ruthenium layer may be deposited thereon. In one example, the copper material is formed during a bottom-up, electroless deposition process directly on the ruthenium layer. Alternatively, a seed layer may be formed on the ruthenium layer prior to depositing the copper material.

Claims

1. A method for forming a copper-containing material on a substrate, comprising:

forming a barrier layer on a substrate;

forming a ruthenium material on the barrier layer; and

exposing the substrate to an electroless copper solution containing an inhibitor source to form a copper material on the ruthenium material.

2. The method of claim 1, wherein the copper material is deposited as a seed layer and a bulk layer is deposited thereon.

3. The method of claim 2, wherein the bulk layer comprises copper and is formed by an electroless deposition process or an electrochemical plating process.

4. The method of claim 1, wherein the copper material is deposited as a bulk layer.

5. The method of claim 4, wherein at least one aperture on the substrate is filled free or substantially free of voids and seams within the copper material.

6. The method of claim 5, wherein a field across the substrate is maintained free or substantially free of the copper material while exposing the substrate to the electroless copper solution.

7. The method of claim 1, wherein the barrier layer contains a barrier material selected from the group consisting of tantalum, tantalum nitride, tantalum silicon nitride, titanium, titanium nitride, titanium silicon nitride, tungsten nitride, alloys thereof, derivatives thereof and combinations thereof.

8. The method of claim 7, wherein the barrier layer contains a tantalum nitride material deposited to a thickness of about 20 Å

or less by an atomic layer deposition process or a physical vapor deposition process.

9. The method of claim 8, wherein the ruthenium material is deposited to a thickness of about 20 Å

or less by an atomic layer deposition process or a physical vapor deposition process.

10. The method of claim 9, wherein the substrate is exposed to an annealing process after forming the ruthenium material and prior to forming the copper material.

11. The method of claim 1, wherein the electroless copper solution, comprises:

a copper source at a concentration within a range from about 10 mM to about 40 mM;

an EDTA source at a concentration within a range from about 75 mM to about 400 mM;

a glyoxylic acid source at a concentration within a range from about 100 mM to about 400 mM;

a surfactant source at a concentration of about 1,000 ppm or less;

a dipyridyl source at a concentration within a range from about 10 ppm to about 100 ppm; and

a pH adjusting agent at a concentration to provide a pH value of at least about 11.

12. The method of claim 11, further comprising:

the copper source at a concentration of about 26 mM;

the EDTA source at a concentration of about 205 mM;

the glyoxylic acid source at a concentration of about 217 mM;

a PEG source at a concentration of about 0.5 g/L;

the dipyridyl source at a concentration of about 25 ppm; and

the pH adjusting agent at a concentration to provide a pH value of at least about 12.

13. The method of claim 11, wherein the electroless copper solution is formed by an in-line mixing process and is exposed at a point-of-use to the substrate.

14. The method of claim 13, wherein a copper concentrate solution, a reductant concentrate solution and water are combined during the in-line mixing process.

15. The method of claim 14, wherein the copper concentrate solution and the reductant concentrate solution each contain equal or substantially equal concentrations of a complexing agent.

16. The method of claim 1, wherein the electroless copper solution, comprises:

a copper source at a concentration within a range from about 10 mM to about 40 mM;

a complexing agent source at a concentration within a range from about 75 mM to about 400 mM;

a reductant source at a concentration within a range from about 100 mM to about 400 mM;

the inhibitor source at a concentration within a range from about 10 ppm to about 100 ppm; and

a pH adjusting agent at a concentration to provide a pH value of at least about 10.

17. A method for forming a copper-containing material on a substrate, comprising:

depositing a ruthenium tantalum alloy on a substrate during a first deposition process; and

exposing the substrate to an electroless copper solution to form a copper material on the ruthenium tantalum alloy.

18. The method of claim 17, wherein the ruthenium tantalum alloy is deposited by a physical vapor deposition process and contains about 50 wt % ruthenium and about 50 wt % tantalum.

19. The method of claim 18, wherein the ruthenium tantalum alloy is deposited to a thickness of about 20 Å

or less.

20. The method of claim 17, wherein the copper material is deposited as a seed layer and a bulk layer is deposited thereon.

21. The method of claim 20, wherein the bulk layer comprises copper and is formed by an electroless deposition process or an electrochemical plating process.

22. The method of claim 17, wherein the copper material is deposited as a bulk layer.

23. The method of claim 22, wherein at least one aperture on the substrate is filled free or substantially free of voids and seams within the copper material.

24. The method of claim 23, wherein a field across the substrate is free or substantially free of the copper material, while forming the copper material during an electroless deposition process.

25. The method of claim 17, wherein the electroless copper solution, comprises:

a copper source at a concentration within a range from about 10 mM to about 40 mM;

an EDTA source at a concentration within a range from about 75 mM to about 400 mM;

a glyoxylic acid source at a concentration within a range from about 100 mM to about 400 mM;

a surfactant source at a concentration of about 1,000 ppm or less;

an inhibitor source at a concentration within a range from about 10 ppm to about 100 ppm; and

a pH adjusting agent at a concentration to provide a pH value of at least about 11.

26. The method of claim 25, further comprising:

the copper source at a concentration of about 26 mM;

the EDTA source at a concentration of about 205 mM;

the glyoxylic acid source at a concentration of about 217 mM;

a PEG source at a concentration of about 0.5 g/L;

a dipyridyl source at a concentration of about 25 ppm; and

the pH adjusting agent at a concentration to provide a pH value of at least about 12.

27. The method of claim 25, wherein the electroless copper solution is formed by an in-line mixing process and is exposed at a point-of-use to the substrate.

28. The method of claim 27, wherein a copper concentrate solution, a reductant concentrate solution and water are combined during the in-line mixing process.

29. The method of claim 28, wherein the copper concentrate solution and the reductant concentrate solution each contain equal or substantially equal concentrations of a complexing agent.

30. The method of claim 17, wherein the electroless copper solution, comprises:

a copper source at a concentration within a range from about 10 mM to about 40 mM;

a complexing agent source at a concentration within a range from about 75 mM to about 400 mM;

a reductant source at a concentration within a range from about 100 mM to about 400 mM;

an inhibitor source at a concentration within a range from about 10 ppm to about 100 ppm; and

a pH adjusting agent at a concentration to provide a pH value of at least about 10.

31. A method for forming a copper-containing material on a substrate, comprising:

forming a barrier layer on a substrate having at least one aperture;

forming a ruthenium material on the barrier layer; and

filling the at least one aperture free or substantially free of voids and seams with a copper material during an electroless deposition process.

32. The method of claim 31, wherein the copper material is formed from an electroless copper solution containing an inhibitor source during the electroless deposition process.

33. The method of claim 31, wherein a copper seed layer is deposited on the ruthenium material prior to filling the at least one aperture.

34. The method of claim 33, wherein the copper seed layer is deposited by a copper electroless deposition process or a physical vapor deposition process.

35. The method of claim 31, wherein a field across the substrate is free or substantially free of the copper material during the electroless deposition process.

36. The method of claim 31, wherein the barrier layer contains a barrier material selected from the group consisting of tantalum, tantalum nitride, tantalum silicon nitride, titanium, titanium nitride, titanium silicon nitride, tungsten nitride, alloys thereof, derivatives thereof and combinations thereof.

37. The method of claim 36, wherein the barrier layer contains a tantalum nitride material deposited to a thickness of about 20 Å

or less by an atomic layer deposition process or a physical vapor deposition process.

38. The method of claim 37, wherein the ruthenium material is deposited to a thickness of about 20 Å

or less by an atomic layer deposition process or a physical vapor deposition process.

39. The method of claim 38, wherein the substrate is exposed to an annealing process after forming the ruthenium material and prior to forming the copper material.

40. The method of claim 31, wherein the electroless deposition process includes exposing the substrate to an electroless copper solution, comprising:

a copper source at a concentration within a range from about 10 mM to about 40 mM;

an EDTA source at a concentration within a range from about 75 mM to about 400 mM;

a glyoxylic acid source at a concentration within a range from about 100 mM to about 400 mM;

a surfactant source at a concentration of about 1,000 ppm or less;

an inhibitor source at a concentration within a range from about 10 ppm to about 100 ppm; and

a pH adjusting agent at a concentration to provide a pH value of at least about 11.

41. The method of claim 40, further comprising:

the copper source at a concentration of about 26 mM;

the EDTA source at a concentration of about 205 mM;

the glyoxylic acid source at a concentration of about 217 mM;

a PEG source at a concentration of about 0.5 g/L;

a dipyridyl source at a concentration of about 25 ppm; and

the pH adjusting agent at a concentration to provide a pH value of at least about 12.

42. The method of claim 40, wherein the electroless copper solution is formed by an in-line mixing process and is exposed at a point-of-use to the substrate.

43. The method of claim 42, wherein a copper concentrate solution, a reductant concentrate solution and water are combined during the in-line mixing process.

44. The method of claim 43, wherein the copper concentrate solution and the reductant concentrate solution each contain equal or substantially equal concentrations of a complexing agent.

45. The method of claim 31, wherein the electroless deposition process includes exposing the substrate to an electroless copper solution, comprising:

a copper source at a concentration within a range from about 10 mM to about 40 mM;

a complexing agent source at a concentration within a range from about 75 mM to about 400 mM;

a reductant source at a concentration within a range from about 100 mM to about 400 mM;

an inhibitor source at a concentration within a range from about 10 ppm to about 100 ppm; and

a pH adjusting agent at a concentration to provide a pH value of at least about 10.

46. A method for forming a copper-containing material on a substrate, comprising:

forming a barrier layer on a substrate during a first atomic layer deposition process or a physical vapor deposition process;

forming a ruthenium layer having a thickness of about 20 Å

or less on the barrier layer during a second atomic layer deposition process; and

exposing the substrate to an electroless copper solution containing an inhibitor source to form a copper material on the ruthenium layer.

47. A method for forming a copper-containing material on a substrate, comprising:

depositing a ruthenium material on a barrier layer disposed on a substrate;

combining at least a copper concentrate solution and water by an in-line mixing step to form an electroless copper solution; and

exposing the substrate to the electroless copper solution to form a copper material on the ruthenium material.

48. The method of claim 47, wherein a reductant concentrate solution is also combined with the copper concentrate solution and the water during the in-line mixing step.

49. The method of claim 48, wherein the copper concentrate solution and the reductant concentrate solution each contain equal or substantially equal concentrations of a complexing agent.

50. The method of claim 47, wherein the electroless copper solution, comprises:

a copper source at a concentration within a range from about 10 mM to about 40 mM;

an EDTA source at a concentration within a range from about 75 mM to about 400 mM;

a glyoxylic acid source at a concentration within a range from about 100 mM to about 400 mM;

a surfactant source at a concentration of about 1,000 ppm or less;

an inhibitor source at a concentration within a range from about 10 ppm to about 100 ppm; and

a pH adjusting agent at a concentration to provide a pH value of at least about 11.