SENSOR BLOCK
First Claim
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1. A sensor block, comprising a plurality of sensor chips each including a semiconductor substrate having a detection unit formed therein, wherein the semiconductor substrates of said sensor chips are electrically bonded to a common base block and supported thereon.
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Abstract
A sensor block that includes a plurality of sensor chips in combination. Each sensor chip includes a semiconductor substrate having a detection unit formed therein, and two glass substrates bonded to both sides of the semiconductor substrate. One of the glass substrates is shared among the sensor chips and serves as a base block to support the sensor chips.
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Citations
16 Claims
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1. A sensor block, comprising a plurality of sensor chips each including a semiconductor substrate having a detection unit formed therein,
wherein the semiconductor substrates of said sensor chips are electrically bonded to a common base block and supported thereon.
Specification