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Stage unit and exposure apparatus

  • US 20070103660A1
  • Filed: 11/07/2006
  • Published: 05/10/2007
  • Est. Priority Date: 01/11/2005
  • Status: Active Grant
First Claim
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1. A stage unit, comprising:

  • a first stage that has a mount section on which an object is mounted;

    a first drive mechanism that has a first mover that is connected to the first stage and a first stator that works with the first mover, and drives the first stage in a first axis direction; and

    a first counterweight that has a first section that is connected to the first stator, a second section that is arranged along the first axis direction separately from the first section and a connection section that connects the first section and the second section, and moves in a direction opposite to the first stage in accordance with movement of the first stage in the first axis direction.

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