Stage unit and exposure apparatus
First Claim
1. A stage unit, comprising:
- a first stage that has a mount section on which an object is mounted;
a first drive mechanism that has a first mover that is connected to the first stage and a first stator that works with the first mover, and drives the first stage in a first axis direction; and
a first counterweight that has a first section that is connected to the first stator, a second section that is arranged along the first axis direction separately from the first section and a connection section that connects the first section and the second section, and moves in a direction opposite to the first stage in accordance with movement of the first stage in the first axis direction.
1 Assignment
0 Petitions
Accused Products
Abstract
When a stage on which a wafer is mounted is driven in an X-axis direction by a liner motor, a reaction force of the drive force is generated at a stator and acts on a counterweight via the stator, and thereby the counterweight moves in a direction opposite to the stage in accordance with movement of the stage in the X-axis direction. Accordingly, the reaction force generated by the drive of the stage can substantially be canceled by the movement of the counterweight. Further, since the counterweight has a first section that is connected to the stator, and a second section that is separated from the first section in the X-axis direction and connected to the first section via a connection section, a partition wall of a chamber can be placed using the connected portion as a boundary, and the second section of the counterweight can be located outside the partition wall. Thus, a stage housing space can be set to smaller.
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Citations
15 Claims
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1. A stage unit, comprising:
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a first stage that has a mount section on which an object is mounted;
a first drive mechanism that has a first mover that is connected to the first stage and a first stator that works with the first mover, and drives the first stage in a first axis direction; and
a first counterweight that has a first section that is connected to the first stator, a second section that is arranged along the first axis direction separately from the first section and a connection section that connects the first section and the second section, and moves in a direction opposite to the first stage in accordance with movement of the first stage in the first axis direction. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9)
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10. A stage unit, comprising:
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a stage that has a mount section on which an object is mounted;
a drive mechanism that has a coil and a magnet, and drives the stage in one axis direction; and
a counterweight where at least one of an electric current supply section that supplies electric current to the coil and a fluid supply section that supplies a fluid to the coil is formed, and that moves in a direction opposite to the stage in accordance with movement of the stage in the one axis direction. - View Dependent Claims (11, 12, 13)
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14. A stage unit, comprising:
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a stage that has a mount section on which an object is mounted;
a drive mechanism that has a mover that is connected to the stage and a stator that works with the mover, and drives the stage in one axis direction; and
a counterweight that has a first section that is connected to the stator and a second section that is placed in a second space that is different from a first space in which the first section is placed, and moves in a direction opposite to the stage in accordance with movement of the stage in the one axis direction.
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15. A stage unit, comprising:
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a stage that has a mount section on which an object is mounted;
a drive mechanism that has a mover that is connected to the stage and a stator that works with the mover, and drives the stage in one axis direction; and
a counterweight that has a first section that is connected to the stator and moves in a direction opposite to the stage in accordance with movement of the stage in the one axis direction, a second section that is supported movable synchronously with the first section and a connection section that connects the first section and the second section.
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Specification