System and method for correcting for pressure variations using a motor

• US 20070104586A1
• Filed: 11/20/2006
• Published: 05/10/2007
• Est. Priority Date: 11/23/1998
• Status: Active Grant

• Current Assignee: Entegris Incorporated
• Original Assignee: Entegris Incorporated
• Inventors: Cedrone, James, Gonnella, George, McLoughlin, Robert, Zagars, Raymond
• Granted Patent: US 8,172,546 B2
• Time in Patent Office: Days
• US Class Current: 417/26
• CPC Class Codes: F04B 13/00 Pumps specially modified to deliver fixed or variable measured quantities
• CPC Class Codes: F04B 2201/0201 Position of the piston
• CPC Class Codes: F04B 2201/0601 Opening times
• CPC Class Codes: F04B 2205/03 Pressure in the compression chamber
• CPC Class Codes: F04B 43/02 having plate-like flexible members, e.g. diaphragms F04B43/14 takes precedence
• CPC Class Codes: F04B 49/065 and making use of computers
• CPC Class Codes: F04B 7/0076 the members being actuated by electro-magnetic means
• CPC Class Codes: Y10T 137/87885 Sectional block structure

Abstract

Systems and methods for compensating for pressure increase which may occur in various enclosed spaces of a pumping apparatus are disclosed. Embodiments of the present invention may compensate for pressure increases in chambers of a pumping apparatus by moving a pumping means of the pumping apparatus to adjust the volume of the chamber to compensate for a pressure increase in the chamber. More specifically, in one embodiment, to account for unwanted pressure increases to the fluid in a dispense chamber the dispense motor may be reversed to back out piston to compensate for any pressure increase in the dispense chamber.

Claims

1. A method, comprising:

introducing fluid into a chamber of a pumping apparatus; and

moving a pumping means of the pumping apparatus to adjust the volume of the chamber to compensate for a pressure variation in the chamber.

2. The method of claim 1, wherein the pressure variation is a pressure decrease due to the opening of a valve.

3. The method of claim 1, wherein the pressure variation is a pressure increase due to the closing of a valve.

4. The method of claim 3, wherein the pressure increase is approximately proportional to a hold-back volume of the valve.

5. The method of claim 4, wherein the pumping means is moved to increase the volume of the chamber by an amount substantially equal to the hold-back volume of the valve.

6. The method of claim 5, further comprising moving the pumping means to dispense fluid from the pumping apparatus.

7. The method of claim 5, wherein the pumping means is moved to increase the volume of the chamber by approximately an overshoot volume and then moved to decrease the volume of the chamber by approximately the overshoot volume.

8. The method of claim 7, further comprising moving the pumping means to dispense fluid from the pumping apparatus.

9. The method of claim 4, wherein the pumping means is moved to increase the volume of the chamber until a desired pressure is achieved in the chamber.

10. The method of claim 9, further comprising moving the pumping means to dispense fluid from the pumping apparatus.

11. The method of claim 9, wherein the pumping means is moved to increase the volume of the chamber until a pressure below a desired pressure is achieved in the chamber and then moved to decrease the volume of the chamber until approximately the desired pressure is achieved.

12. The method of claim 11, further comprising moving the pumping means to dispense fluid from the pumping apparatus.

13. A computer readable medium, comprising instructions translatable for:

introducing fluid into a chamber of a pumping apparatus; and

moving a pumping means of the pumping apparatus to adjust the volume of the chamber to compensate for a pressure variation in the chamber.

14. The computer readable medium of claim 13, wherein the pressure variation is a pressure decrease due to the opening of a valve

15. The computer readable medium of claim 13, wherein the pressure variation is a pressure increase due to the closing of a valve.

16. The computer readable medium of claim 15, wherein the pressure increase is approximately proportional to a hold-back volume of the valve.

17. The computer readable medium of claim 16, wherein the pumping means is moved to increase the volume of the chamber by an amount substantially equal to the hold-back volume of the valve.

18. The computer readable medium of claim 17, further comprising moving the pumping means to dispense fluid from the pumping apparatus.

19. The computer readable medium of claim 17, wherein the pumping means is moved to increase the volume of the chamber by approximately an overshoot volume and then moved to decrease the volume of the chamber by approximately the overshoot volume.

20. The computer readable medium of claim 19, further comprising moving the pumping means to dispense fluid from the pumping apparatus.

21. The computer readable medium of claim 16, wherein the pumping means is moved to increase the volume of the chamber until a desired pressure is achieved in the chamber.

22. The computer readable medium of claim 21, further comprising moving the pumping means to dispense fluid from the pumping apparatus.

23. The computer readable medium of claim 21, wherein the pumping means is moved to increase the volume of the chamber until a pressure below a desired pressure is achieved in the chamber and then moved to decrease the volume of the chamber until approximately the desired pressure is achieved.

24. The computer readable medium of claim 23, further comprising moving the pumping means to dispense fluid from the pumping apparatus.

25. A system, comprising

a pumping apparatus comprising a feed chamber, a dispense chamber operable to receive fluid for dispense and a pumping means within the dispense chamber;

and

a controller configured to regulate the movement of the pumping means of the pumping apparatus to adjust the volume of the dispense chamber to compensate for a pressure variation in the dispense chamber

26. The system of claim 25, wherein the pressure variation is a pressure decrease due to the opening of a valve.

27. The system of claim 26, wherein the pressure variation is a pressure increase due to the closing of a valve.

28. The system of claim 27, wherein the pressure increase is approximately proportional to a hold-back volume of the valve.

29. The system of claim 28, wherein adjusting the volume of the dispense chamber comprises moving the pumping means to increase the volume of the chamber by an amount substantially equal to the hold-back volume of the valve.

30. The system of claim 29, wherein the control system is further operable to regulate the movement of the pumping means to dispense fluid from the pumping-apparatus.

31. The system of claim 29, wherein adjusting the volume of the dispense chamber comprises moving the pumping means to increase the volume of the chamber by approximately an overshoot volume and then moved to decrease the volume of the chamber by approximately the overshoot volume.

32. The system of claim 31, wherein the control system is further operable to regulate the movement of the pumping means to dispense fluid from the pumping apparatus.

33. The system of claim 28, wherein adjusting the volume of the dispense chamber comprises moving the pumping means to increase the volume of the chamber until a desired pressure is achieved in the chamber.

34. The system of claim 33, wherein the control system is further operable to regulate the movement of the pumping means to dispense fluid from the pumping apparatus.

35. The system of claim 33, wherein adjusting the volume of the dispense chamber comprises moving the pumping means to increase the volume of the chamber until a pressure below a desired pressure is achieved in the chamber and then moved to decrease the volume of the chamber until approximately the desired pressure is achieved.

36. The system of claim 35, wherein the control system is further operable to regulate the movement of the pumping means to dispense fluid from the pumping apparatus.