SUBSTRATE PROCESSING APPARATUS
0 Assignments
0 Petitions
Accused Products
Abstract
The substrate processing apparatus has an enclosure structure enclosing a substrate support member to define a processing space. The enclosure structure has an opening closed by a shutter. A processing fluid supply unit, which supplies processing fluid, such as chemical liquid, is accommodated in a housing. The processing fluid supply unit accommodated in the housing is advanced into the processing space through the opening of the enclosure structure to feed the processing fluid onto the substrate supported by the substrate support member.
35 Citations
10 Claims
-
1-5. -5. (canceled)
-
6. A substrate processing apparatus comprising:
-
a substrate support member that supports a substrate arranged in a processing space;
a first processing fluid supply unit that supplies a processing fluid onto a substrate supported by the substrate support member;
a second processing fluid supply unit that supplies a processing fluid onto a substrate supported by the substrate support member;
a first housing defining a first room separated from the processing space in which the substrate support member is arranged, the first room being adapted to accommodate the first processing fluid supply unit; and
a second housing defining a second room separated from the first room and from the processing space in which the substrate support member is arranged, the second room being adapted to accommodate the second processing fluid supply unit. - View Dependent Claims (7, 8, 9)
-
-
10-22. -22. (canceled)
Specification