Vibration sensor
First Claim
1. A vibration sensor for outputting, as vibration signals, variations of capacitance between a fixed electrode and a diaphragm electrode opposed thereto, wherein the diaphragm electrode has slits formed in the same plate member to define a diaphragm portion positioned centrally to be vibrated and displaced only by gravity, a fixed portion positioned peripherally, and elastic support portions for connecting the diaphragm portion to the fixed portion.
1 Assignment
0 Petitions
Accused Products
Abstract
In a vibration sensor for outputting, as vibration signals, variations of capacitance between a fixed electrode and a diaphragm 3 electrode opposed thereto, the diaphragm electrode 3 has slits 3a formed in the same plate member to define a diaphragm portion 3b positioned centrally to be vibrated and displace only by gravity, a fixed portion 3c positioned peripherally, and elastic support portions 3d for connecting the diaphragm portion 3b to the fixed portion 3c.
16 Citations
5 Claims
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1. A vibration sensor for outputting, as vibration signals, variations of capacitance between a fixed electrode and a diaphragm electrode opposed thereto,
wherein the diaphragm electrode has slits formed in the same plate member to define a diaphragm portion positioned centrally to be vibrated and displaced only by gravity, a fixed portion positioned peripherally, and elastic support portions for connecting the diaphragm portion to the fixed portion.
Specification